Method for fabricating side shields in a magnetic writer
View Patent ↗A method and system provide a magnetic transducer having an air-bearing surface (ABS) location, a pole and a gap. The pole has a bottom and a top wider than the bottom. The gap is on the top of the pole and at least as wide as the top of the pole such that an overhang is formed between a top edge of the gap and a bottom edge of the bottom of the pole. The method includes providing a plurality of bottom antireflective coatings (BARCs). The plurality of BARCs form a BARC layer that fills the overhang. A shield photoresist mask is provided on at least a portion of the BARC layer. The shield, which includes at least one side shield, is provided.
1. A method for fabricating a shield for a magnetic transducer having air-bearing surface (ABS) location, a pole and a gap, the pole having a bottom and a top wider than the bottom, the gap residing on the top of the pole and being at least as wide as the top of the pole such that an overhang is formed between a top edge of the gap and a bottom edge of the bottom of the pole, the method comprising:
providing a plurality of bottom antireflective coatings (BARCs), the plurality of BARCs forming a BARC layer, the BARC layer filling the overhang;
providing a shield photoresist mask on at least a portion of the BARC layer; and
providing the shield, the shield including at least one side shield.
2. The method of claim 1 wherein the shield is a wraparound shield including the at least one side shield and a trailing shield.
3. The method of claim 1 wherein the step of providing the plurality of BARCs further includes providing at least two BARCs.
4. The method of claim 1 wherein the step of providing the plurality of BARCs further includes:
spin coating a first BARC;
spin coating a second BARC on the first BARC.
5. The method of claim 4 wherein the step of providing the plurality of BARCS further includes:
spin coating a third BARC on the second BARC.
6. The method of claim 4 wherein each of the first BARC and the second BARC has a thickness of at least twenty nanometers and not more than sixty nanometers.
7. The method of claim 6 each of the first BARC and the second BARC has the thickness of at least twenty-five nanometers and not more than thirty-five nanometers.
8. The method of claim 1 wherein the step of providing the photoresist mask further includes:
depositing a photoresist layer;
selectively exposing a portion of the photoresist layer to light; and
removing the portion of the photoresist layer.
9. The method of claim 8 wherein the step of removing the photoresist layer further includes:
exposing at least the photoresist layer to a developer.
10. The method of claim 1 wherein the BARC layer is an organic BARC layer.
11. The method of claim 1 wherein the BARC layer is a developable BARC layer removable by a developer.
12. A method for fabricating a shield for a magnetic transducer having air-bearing surface (ABS) location, a pole and a gap, the pole having a bottom and a top wider than the bottom such that an overhang is formed between a top edge of the top of the pole and a bottom edge of the bottom of the pole, the gap residing on the top of the pole and being at least as wide as the top of the pole, the method comprising:
spin coating a first developable bottom antireflective coating (BARC) over the pole and the gap;
spin coating a second developable BARC on the first developable BARC, a developable BARC (DBARC) layer including the first developable BARC and the second developable BARC filling the overhang;
depositing a photoresist layer on the DBARC layer;
selectively exposing a portion of the photoresist layer to light;
removing the portion of the photoresist layer using a developer to provide a shield photoresist mask, a portion of the DBARC layer being removed by the developer; and
plating a shield layer for the shield.
13. The method of claim 12 further comprising:
spin coating a third developable BARC on the second developable BARC, the first developable BARC, the second developable BARC and the third developable BARC forming the DBARC layer filling the overhang.
14. A magnetic transducer having air-bearing surface (ABS) comprising:
a pole having a bottom and a top wider than the bottom;
a write gap on the pole, the gap being at least as wide as the top of the pole such that an overhang is formed between a top edge of the gap and a bottom edge of the bottom of the pole, the overhang being free of photoresist residue;
a side gap; and
a shield including at least one side shield, the side gap separating the pole from the at least one side shield.
15. The magnetic transducer of claim 14 wherein the shield further includes a trailing shield, the write gap being between the pole and the trailing shield.