Granted Patent B1

US 9,135,930 · App. 14/300,482 · Granted Sep 15, 2015

Abstract

Claims (68)

1. A method for fabricating magnetic transducer having air-bearing surface (ABS) location and an intermediate layer comprising:

forming a trench in the intermediate layer, the trench having a shape and location corresponding to a main pole;

providing a main pole, at least a portion of the main pole residing in the trench, the step of providing the main pole further including

vacuum depositing a first main pole material layer, the first main pole material layer being thin enough to preclude filling of the trench;

ion beam etching a portion of the first main pole material layer within the trench;

vacuum depositing a second main pole layer, the second main pole material layer being thin enough to preclude filling of the trench; and

depositing an additional main pole layer.

2. The method of claim 1 wherein the step of providing the main pole further includes:

removing a portion of at least the additional main pole layer, forming a trailing bevel in the main pole.

3. The method of claim 1 further comprising:

providing a write gap; and

providing a shield.

4. The method of claim 3 wherein the shield includes a wraparound shield.

5. The method of claim 1 wherein the step of depositing the additional pole layer further includes:

at least one of plating the additional pole layer and sputtering the additional pole layer.

6. A method for fabricating magnetic transducer having air-bearing surface (ABS) location and an intermediate layer comprising:

forming a trench in the intermediate layer, the trench having a shape and location corresponding to a main pole;

providing a main pole, at least a portion of the main pole residing in the trench, the step of providing the main pole further including

vacuum depositing a first main pole material layer, the first main pole material layer being thin enough to preclude filling of the trench;

ion beam etching a portion of the first main pole material layer;

vacuum depositing a second main pole layer, the second main pole material layer being thin enough to preclude filling of the trench;

ion beam etching a portion of the second main pole material layer, a remaining portion of the first main pole layer and the second main pole layer partially filling the trench such that a portion of the trench remains open; and

depositing an additional main pole layer after the step of ion beam etching.

7. The method of claim 6 wherein the step of providing the main pole further includes:

vacuum depositing a third main pole material layer before the step of depositing the additional main pole layer, the third main pole material layer being thin enough to preclude filling of the trench; and

ion beam etching a portion of the third main pole material layer before the step of depositing the additional main pole layer.

8. A method for fabricating magnetic transducer having air-bearing surface (ABS) location and an intermediate layer comprising:

forming a trench in the intermediate layer, the trench having a shape and location corresponding to a main pole;

providing a main pole, at least a portion of the main pole residing in the trench, the step of providing the main pole further including

vacuum depositing a first main pole material layer, the first main pole material layer being thin enough to preclude filling of the trench;

ion beam etching a portion of the first main pole material layer;

vacuum depositing a second main pole layer, the second main pole material layer being thin enough to preclude filling of the trench, wherein the step of vacuum depositing the first main pole layer further includes

ion beam depositing the first main pole layer at an ion beam deposition angle of at least zero degrees and not more than sixty degrees from a direction perpendicular to a surface of the intermediate layer in a rotation mode; and

depositing an additional main pole layer.

9. The method of claim 8 wherein the first main pole layer has a thickness of at least ten nanometers and not more than one hundred nanometers.

10. A method for fabricating magnetic transducer having air-bearing surface (ABS) location and an intermediate layer comprising:

forming a trench in the intermediate layer, the trench having a shape and location corresponding to a main pole;

providing a main pole, at least a portion of the main pole residing in the trench, the step of providing the main pole further including

vacuum depositing a first main pole material layer, the first main pole material layer being thin enough to preclude filling of the trench;

ion beam etching a portion of the first main pole material layer, wherein the step of ion beam etching the first main pole layer is performed at an ion beam etch angle of at least zero degrees and not more than sixty degrees from a direction perpendicular to a surface of the intermediate layer;

vacuum depositing a second main pole layer, the second main pole material layer being thin enough to preclude filling of the trench; and

depositing an additional main pole layer.

11. The method of claim 10 wherein the step of ion beam etching the first main pole layer removes at least one nanometer and not more than ten nanometers of the first main pole layer.

12. A method for fabricating magnetic transducer having air-bearing surface (ABS) location and an intermediate layer comprising:

forming a trench in the intermediate layer, the trench having a shape and location corresponding to a main pole;

providing a main pole, at least a portion of the main pole residing in the trench, the step of providing the main pole further including

vacuum depositing a first main pole material layer, the first main pole material layer being thin enough to preclude filling of the trench;

ion beam etching a portion of the first main pole material layer;

vacuum depositing a second main pole layer, the second main pole material layer being thin enough to preclude filling of the trench, wherein the step of vacuum depositing the second main pole layer further includes

ion beam depositing the second main pole layer at an ion beam deposition angle of at least zero degrees and not more than sixty degrees from a direction perpendicular to a surface of the intermediate layer in a rotation mode; and

depositing an additional main pole layer.

13. The method of claim 12 wherein the second main pole layer has a thickness of at least ten nanometers and not more than one hundred nanometers.

14. A method for fabricating magnetic transducer having air-bearing surface (ABS) location and an intermediate layer comprising:

forming a trench in the intermediate layer, the trench having a shape and location corresponding to a main pole;

providing a main pole, at least a portion of the main pole residing in the trench, the step of providing the main pole further including

ion beam depositing a first main pole material layer at a first ion beam deposition angle of at least fifty degrees and not more than fifty-two degrees from a direction perpendicular to a surface of the intermediate layer in a rotation mode, the first main pole material layer having a thickness of at least forty nanometers and not more than fifty nanometers such that filling of the trench by the first main pole material is precluded;

ion beam etching a portion of the first main pole material layer at a first ion beam etch angle of at least fifty-four degrees and not more than fifty-six degrees from the direction in a sweep mode, the first ion beam etch removing at least three nanometers and not more than seven nanometers of the first main pole material layer;

ion beam depositing a second main pole material layer at a second ion beam deposition angle of at least thirty-seven degrees and not more than thirty-nine degrees from the direction in the rotation mode, the second main pole material layer having a thickness of at least forty nanometers and not more than fifty nanometers such that filling of the trench by the second main pole material is precluded;

ion beam etching a portion of the second main pole material layer at a second ion beam etch angle of at least thirty-nine degrees and not more than forty-one degrees from the direction in a sweep mode, the first ion beam etch removing at least three nanometers and not more than seven nanometers of the first main pole material layer; and

plating an additional main pole layer.

15. A magnetic transducer having air-bearing surface (ABS) location comprising:

a main pole including at least one vacuum deposited layer and at least one deposited layer, the at least one vacuum deposited layer being free of voids, the main pole being free of stripe domains, the main pole further including a trailing bevel; and

at least one coil for energizing the main pole.

16. The magnetic transducer of claim 15 further comprising:

a leading shield;

a side gap; and

a wraparound shield, the side gap residing between the main pole and the wraparound shield.

17. The magnetic transducer of claim 15 wherein the at least one deposited layer includes at least one of a plated layer and a sputtered layer.

Assignments (8)