Method for fabricating a magnetic write pole having a leading edge bevel
View Patent ↗A method provides a magnetic transducer having an air-bearing surface (ABS) location. An intermediate layer having a substantially flat bottom surface is provided. A trench is formed in the intermediate layer. The trench is wider in yoke region than in the pole tip region. The trench has a first depth in the yoke region and a second depth less than the first depth in the pole tip region. A portion of the intermediate layer is at the bottom of the trench at the ABS location. A nonmagnetic layer is provided. The nonmagnetic layer fills part of the trench in the pole tip region such that the trench has a third depth less than the second depth at the ABS location. A main pole is provided. The main pole has a leading bevel adjacent to nonmagnetic layer in the portion of the pole tip region of the trench.
1. A method for fabricating magnetic transducer having air-bearing surface (ABS) location comprising:
providing an intermediate layer having a substantially flat bottom surface that is substantially perpendicular to the ABS location;
forming a trench in the intermediate layer, the trench having a bottom, a pole tip region and a yoke region, the yoke region of the trench being wider than the pole tip region in a cross-track direction, the cross track direction being parallel to the ABS location, the trench having a first depth in the yoke region in a down track direction, the down track direction being perpendicular to the cross track direction and parallel to the ABS location, the trench having a second depth in the down track direction at the ABS location in the pole tip region, the second depth being less than the first depth such that a portion of the intermediate layer is at the bottom of the trench at the ABS location;
providing a nonmagnetic layer in at least the trench, the nonmagnetic layer filling a portion of the trench in the pole tip region such that a remaining portion of the trench has a third depth at the ABS location, the third depth being less than the second depth; and
providing a main pole, at least a portion of the main pole residing in the trench, the main pole having a leading surface including a leading bevel in the portion of the pole tip region of the trench and the adjacent to nonmagnetic layer.
2. The method of claim 1 wherein the nonmagnetic layer has a thickness in the yoke region and fills the portion of the pole tip region of the trench such that the third depth is less than the second depth by more than the thickness.
3. The method of claim 1 wherein the transducer includes an underlayer, the method further comprising:
providing an etch stop layer on the underlayer, the etch stop layer having a top surface substantially perpendicular to the ABS;
wherein the intermediate layer is provided on the etch stop layer.
4. The method of claim 3 wherein the step of providing the trench further includes:
removing a portion of the intermediate layer such that the bottom of the trench is at the etch stop layer in the yoke region and within the intermediate layer in the portion of the pole tip region.
5. The method of claim 3 wherein the step of providing the intermediate layer further includes full-film depositing an aluminum oxide layer.
6. The method of claim 3 wherein the underlayer includes a leading shield.
7. The method of claim 1 wherein the step of providing the main pole further includes:
plating at least one magnetic material.
8. The method of claim 7 wherein the step of providing the main pole further includes:
removing a portion of the main pole layer adjacent to the ABS location to provide a trailing bevel.
9. The method of claim 1 wherein the step of forming the trench further includes:
reactive ion etching the intermediate layer.
10. The method of claim 9 further comprising:
providing at least one shield.
11. The method of claim 1 further comprising:
providing at least one coil.
12. The method of claim 1 wherein a trench depth monotonically increases from the second depth to the first depth in a direction perpendicular to the ABS.