Method for manufacturing a vertical bipolar transistor compatible with CMOS manufacturing methods
The present disclosure relates to a method for manufacturing a bipolar transistor. The method forms a trench to isolate a first region from a second region in a semiconductor wafer, and to isolate these regions from the rest of the wafer. The method forms first P-doped well in the second region and produces a collector region of second and third wells by a P doping in the first region. The second well is in contact with the first well below the trench. The method also produces an N-doped base well on the collector region and, at the wafer surface, and forms a CMOS transistor gate on the first region and delimiting a third region and a fourth region. The method also forms a P+-doped collector contact region in the first well, forms a P+ doped emitter region in the third region, and forms an N+-doped base contact region in the fourth region.
1. A method, comprising:
forming at least one isolating trench isolating a first region from a second region in a semiconductor wafer, and isolating the first and second regions from a remainder of the wafer;
forming a first well by a first type of doping, in the second region;
producing a collector region, wherein producing the collector region includes forming a second well by the first type of doping, in the first region, the second well being in contact with the first well below the at least one isolating trench, and forming a third well of the first type of doping above and contacting the second well;
producing a base region by forming a fourth well by a second type of doping above the third well and at a surface of the wafer;
forming a CMOS transistor gate on the first region;
performing a doping of the first type, wherein performing the doping of the first type includes forming a collector contact region and an emitter region, respectively in the first well and in the base region adjacent to a first side of the gate; and
forming a base contact region by a doping of the second type in the base region adjacent to a second side of the gate, wherein the third well and the base contact region are produced using a same resist.
2. The method according to claim 1 , wherein the wafer has the first type of doping, the method comprising forming an isolating well by the second type of doping deep in the wafer and below the first and second wells.
3. The method according to claim 2 , comprising forming a CMOS circuit in the wafer, wherein forming the isolating well includes forming the isolating well while forming the CMOS circuit in the wafer.
4. The method according to claim 1 , wherein forming the at least one isolating trench includes forming first and second isolating trenches, the first isolating trench surrounding the first region, and the second trench surrounding the collector contact region and the first isolating trench.
5. The method according to claim 1 , comprising forming a CMOS circuit in the wafer, wherein forming the at least one isolating trench, forming the first well, forming the gate, and forming the collector contact region and the emitter region are performed while forming the CMOS circuit in the wafer.
6. The method according to claim 1 , wherein the second well is more heavily doped than the third well.
7. The method according to claim 1 , wherein the first well is more heavily doped at the surface of the wafer than deep down in the wafer.
8. A bipolar transistor which can be integrated into a CMOS-type integrated circuit structure, the transistor comprising:
at least one isolating trench isolating a first region from a second region in a semiconductor wafer, and isolating the first and second regions from the rest of the wafer;
a first well having a first type of doping, formed in the second region;
a collector region that includes a second well having the first type of doping, in the first region and in contact with the first well below the isolating trench, and a third well of the first type of doping above and contacting the second well;
a base region formed by a fourth well having a second type of doping, above the third well and at a surface of the wafer;
a CMOS transistor gate formed on the first region;
a collector contact region and an emitter region having doping of the first type and positioned respectively in the first well and in the base region adjacent to a first side of the gate; and
a base contact region, having doping of the second type, in the base region and adjacent to a second side of the gate, wherein:
the at least one isolating trench includes a first and a second isolating trench, the first isolating trench surrounding the first region, and the second isolating trench surrounding the collector contact region and the first isolating trench; and
the gate surrounds the emitter region, and the base contact region surrounds the gate.
9. The bipolar transistor according to claim 8 , wherein the emitter region, the gate and the base contact region are aligned and surrounded by the at least one isolating trench.
10. The bipolar transistor according to claim 8 , wherein the emitter region, the gate, the base contact region and the collector contact region are aligned and surrounded by the at least one isolating trench which isolates the base contact region from the collector contact region.
11. The bipolar transistor according to claim 8 , wherein the wafer has the first type of doping, the bipolar transistor comprising an isolating well of the second type of doping deep in the wafer and below the first and second wells.
12. The bipolar transistor according to claim 8 , wherein the second well is more heavily doped than the third well.
13. The bipolar transistor according to claim 8 , wherein the first well is more heavily doped at the surface of the wafer than deep down in the wafer.