Ink jet head and ink jet recording apparatus
According to one embodiment, there is provided an ink jet head which includes a pressure chamber which is formed in a thickness direction of a substrate, and fills ink; a vibrating plate which is provided on a first face of the pressure chamber, and includes a nozzle which communicates with the pressure chamber; a driving unit which is provided on the vibrating plate, and includes a piezoelectric substance; and a warpage reducing layer which is provided on a second face which is opposite to the first face of the pressure chamber, and reduces warpage of the substrate.
1. An ink jet head comprising:
a substrate including a first surface and a second surface opposite the first surface;
a pressure chamber which is formed in a thickness direction of the substrate to penetrate the substrate, and in which ink is filled;
a vibrating plate which is provided on the first surface, and includes a nozzle which communicates with the pressure chamber;
a driver unit which is provided on the vibrating plate, and includes a piezoelectric substance;
a warpage reducing layer which is made of a thermal oxidation film formed on the second surface to reduce warpage of the substrate; and
an ink flow path which fluidly communicates with the pressure chamber,
wherein materials of the warpage reducing layer and the vibrating plate are the same, and film thickness of the warpage reducing layer and the vibrating plate are the same.
2. The head according to claim 1 , further comprising:
a protective layer which covers the driver unit and includes the nozzle which communicates with the pressure chamber.
3. An ink jet recording apparatus comprising:
the head according to claim 2 ; and
a transport unit which transports a recording medium to a position at which the ink is ejected from the ink jet head.
4. An ink jet recording apparatus comprising:
the head according to claim 1 ; and
a transport unit which transports a recording medium to a position at which the ink is ejected from the ink jet head.
5. An ink jet head comprising:
a silicon wafer having a first surface and a second surface opposite the first surface;
a first silicon oxide film formed on the first surface of the silicon wafer;
a second silicon oxide film formed on the second surface of the silicon wafer;
a pressure chamber which is formed in a thickness direction of the silicon wafer to penetrate the silicon wafer and the second silicon oxide film;
a nozzle which is formed in the first silicon oxide film to communicate with the pressure chamber and eject an ink therefrom;
a driving unit which is provided on the first silicon oxide film opposite the silicon wafer, and includes a piezoelectric substance; and
an ink flow path which fluidity communicates with the pressure chamber,
wherein the first and second silicon oxide films are the same thickness.
6. The head according to claim 5 , further comprising a protective layer which covers the driving unit and includes the nozzle which communicates with the pressure chamber.
7. An ink jet recording apparatus comprising:
the head according to claim 5 ; and
a transport unit which transports a recording medium to a position at which the ink is ejected from the ink jet head.