Resistive random access memory (RRAM) cell and method for forming the RRAM cell
A method includes patterning a layered structure comprising a monolithic stack including a bottom electrode surrounded by a dielectric material, a switching material, a barrier material, a dielectric hardmask, and a patterned photoresist formed above and adjacent to a portion of the dielectric hardmask. The patterning includes patterning the dielectric hardmask using a first etchant and employing the patterned photoresist as a mask, patterning the barrier material using a second etchant and employing a portion of the dielectric hardmask remaining after the patterning the dielectric hardmask as a mask, and patterning the switching material using ion milling or etching and employing the portion of the dielectric hardmask remaining after the patterning the barrier material as a mask.
1. A method, comprising:
forming a layered structure comprising a bottom electrode formed within a dielectric material, a switching material, a barrier material, a dielectric hardmask, and a patterned photoresist formed above and adjacent to a portion of the dielectric hardmask;
patterning the dielectric hardmask to form a patterned dielectric hardmask using a first plasma-phase etchant and the patterned photoresist as a mask for the patterned dielectric hardmask;
patterning the barrier material to form a patterned barrier material layer using a second plasma-phase etchant and the patterned dielectric hardmask as a second mask for the patterned barrier material, wherein the first plasma-phase etchant and the second plasma-phase etchant have a different etch selectivity for the dielectric hardmask and the barrier material, respectively; and
patterning the switching material using ion milling and the patterned dielectric hardmask as a third mask for a patterned switching material.
2. The method of claim 1 , further comprising:
removing the patterned photoresist after the patterning the dielectric hardmask and before the patterning the barrier material.
3. The method of claim 1 , wherein the layered structure further comprises a switching matrix formed between the bottom electrode and the switching material, the method further comprising:
patterning the switching matrix using the ion milling and using the patterned dielectric hardmask to mask the switching matrix.
4. The method of claim 3 , wherein the switching matrix is selected from a group consisting of: SiO x , TiO x , amorphous Si, AlO x , HfO x , NiO x , TaO x , NbO x , ZnO x , ZrO x , and GdO x , wherein X is a positive number, and further wherein the switching material comprises at least one of: Pd, Ag, Pt, Au, Cu, Ir, Ru, Al, TiN, Ti, or W.
5. The method of claim 1 , wherein the barrier material is selected from a group consisting of: TiN, Ti, W, and TaN.
6. The method of claim 1 , wherein the dielectric hardmask is selected from a group consisting of: SiO2, SiN, SiC, and amorphous carbon.
7. The method of claim 1 , wherein the ion milling comprises employing at least one of inert gas selected from a group consisting of: Ar, Kr, and Xe.
8. The method of claim 1 , further comprising:
cooling the switching material to less than 100° C. prior to the patterning the switching material using the ion milling.
9. The method of claim 8 , wherein the ion milling comprises utilizing a beam power density from about 0.1 to about 10.0 mA/cm2 at a pressure of about 1.0 E-5 to about 1.0E-3 Torr.
10. A method, comprising:
forming a layered structure comprising a bottom electrode surrounded by a dielectric material, a switching material, a barrier material, a dielectric hardmask, and a patterned photoresist formed above and adjacent to a portion of the dielectric hardmask; and
patterning the layered structure to form a memory cell, wherein the patterning comprises sequentially:
removing a portion of the dielectric hardmask not covered by the patterned photoresist using a first plasma-phase etchant to expose a portion of the barrier material;
removing the patterned photoresist;
removing the portion of the barrier material using a second plasma-phase etchant to expose a portion of the switching material, wherein the first plasma-phase etchant and the second plasma-phase etchant have a different etch selectivity for the dielectric hardmask and the barrier material, respectively; and
removing the portion of the switching material using ion milling.
11. The method of claim 10 , wherein the removing the portion of the barrier material and the removing the portion of the switching material comprises employing a second portion of the dielectric hardmask remaining after the removing the first portion as a mask for the switching material.
12. The method of claim 10 , wherein the removing the patterned photoresist comprises employing ashing and wet chemical cleaning.
13. The method of claim 10 , wherein the second plasma-phase etchant has an etch selectivity for the barrier material over the dielectric hardmask or the switching material at about 10:1.
14. The method of claim 10 , wherein the layered structure further comprises a switching matrix formed between the bottom electrode and the switching material, the method further comprising:
removing a portion of the switching matrix using the ion milling.
15. The method of claim 14 ,
wherein the switching matrix is selected from a group consisting of: SiO x , TiO x , amorphous Si, AlO x , HfO x , NiO x , TaO x , NbO x , ZnO x , ZrO x , and GdO x , wherein X is a positive number, and
wherein the switching material is selected from a second group consisting of: Pd, Ag, Pt, Au, Cu, Ir, Ru, Al, TiN, Ti, and W.
16. The method of claim 10 , wherein the barrier material comprises at least one of: TiN, Ti, W, or TaN, and wherein the dielectric hardmask comprises at least one of: SiO 2 , SiN, SiC, or amorphous carbon.
17. The method of claim 10 , wherein the ion milling comprises employing at least one of inert gas Ar, Kr, or Xe.
18. The method of claim 10 , wherein the ion milling comprises utilizing a beam power density from about 0.1 to about 10.0 mA/cm2 at a pressure of about 1.0 E-5 to about 1.0E-3 Torr.
19. A method for forming a memory cell, comprising:
etching a portion of a dielectric hardmask layer of a monolithic stack structure using a first plasma etchant, resulting in formation of a patterned dielectric hardmask layer formed on a barrier material layer, wherein the monolithic stack structure comprises:
a bottom electrode,
a switching material layer formed over the bottom electrode,
the barrier material layer formed over the switching material layer, and
the dielectric hardmask layer formed over the barrier material layer;
etching a portion of the barrier material layer using a second plasma etchant, resulting in formation of a patterned barrier material layer formed on the switching material layer, wherein the first plasma etchant and the second plasma etchant have a different etch selectivity for the dielectric hardmask layer and the barrier material layer, respectively; and
etching a portion of the switching material layer to form a patterned switching material layer using ion milling.
20. The method of claim 19 , wherein the etching the portion of the barrier layer and the etching the portion of the switching material layer comprises employing the patterned dielectric hardmask layer as a mask.