Fully integrated and encapsulated micro-fabricated vacuum diode and method of manufacturing same
Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anode of the diode; and removing the sacrificial oxide layer.
1. An encapsulated micro diode comprising:
a plurality of columnar portions formed from a substrate having a pyramidal tip at a first end forming a cathode of the diode;
an insulation layer disposed between adjacent ones of the columnar portions, the insulation layer overlying the columnar portion and having an aperture therethrough in a region overlying respective ones of the tips;
a conformal anode disposed above the cathode, wherein the anode conforms to a shape of the pyramidal tip; and
an encapsulation metal disposed on a surface of the insulation layer.
2. The diode according to claim 1 , wherein the tip is disposed within an envelope of the conformal anode.
3. The diode according to claim 1 , further comprising a second aperture in the insulation layer above the columnar portion and adapted to provide a vacuum to the diode during formation of the conformal anode.
4. The diode according to claim 1 , wherein the tip is clad with tungsten.
5. The diode according to claim 1 , wherein the conformal anode is formed from tungsten.
6. The diode according to claim 1 , further comprising a cap disposed on the conformal anode and within the aperture.
7. The diode according to claim 1 , wherein the conformal anode is formed through the aperture in the insulation layer.
8. The diode according to claim 1 , wherein each columnar portion comprises a pyramidal tip at a first end forming a cathode of the diode.
9. The diode according to claim 8 , wherein the insulation layer comprises a plurality of apertures and each aperture overlies each of the pyramidal tips.
10. The diode according to claim 9 , further comprising a plurality of conformal anodes, wherein each conformal anode is disposed above each of the pyramidal tips.
11. An encapsulated micro diode comprising:
a plurality of columnar portions formed from a substrate, wherein each columnar portion has a pyramidal tip at a first end forming a cathode of the diode;
an insulation layer disposed between adjacent ones of the columnar portions, the insulation layer overlying the columnar portion and having a plurality of apertures therethrough, wherein each aperture overlies each of the pyramidal tips;
a plurality of anodes, wherein each anode is disposed above each of the cathodes, wherein each of the anodes is a conformal anode that conforms to a shape of the pyramidal tip; and
an encapsulation metal disposed on a surface of the insulation layer.
12. The diode according to claim 11 , wherein each of the anodes is formed through each of the apertures in the insulation layer.