Liquid-cooled heat exchanger
View Patent ↗A crystal growth furnace comprising a crucible containing at least feedstock material and a liquid-cooled heat exchanger that is vertically movable beneath the crucible to extract heat from it to promote the growth of a crystalline ingot is disclosed. The liquid-cooled heat exchanger comprises a heat extraction bulb made of high thermal conductivity material that is vertically movable into thermal communication with the crucible to extract heat from the crucible using a liquid coolant. A liquid-cooled heat exchanger enclosed in a sealed tubular outer jacket is also disclosed as is a method for producing a crystalline ingot using a vertically movable liquid-cooled heat exchanger.
1. A crystal growth furnace for growing a crystalline ingot comprising:
a crucible containing at least feedstock material; and
a liquid-cooled heat exchanger that is vertically movable beneath the crucible comprising:
a heat extraction bulb made of a material having a thermal conductivity value of greater than about 200 W/(m·k) and having a melting point below a melting point of the feedstock material in the crucible; and
a liquid coolant inlet tube and a liquid coolant outlet tube, wherein the liquid coolant inlet tube, the liquid coolant outlet tube, or both are attached to the heat extraction bulb for circulating a liquid coolant therethrough.
2. The crystal growth furnace of claim 1 , wherein the liquid coolant comprises water.
3. The crystal growth furnace of claim 1 , wherein the melting point of the feedstock and the melting point of the material differ by not more than about 455° C.
4. The crystal growth furnace of claim 1 , wherein the melting point of the feedstock and the melting point of the material differ by not more than about 330° C.
5. The crystal growth furnace of claim 1 , wherein the material comprises copper, silver or gold.
6. The crystal growth furnace of claim 1 , wherein the heat extraction bulb has an internal cavity to receive the liquid coolant from the liquid coolant inlet tube and discharge the liquid coolant through the liquid coolant outlet tube.
7. The crystal growth furnace of claim 6 , wherein the internal cavity is bulbous in shape.
8. The crystal growth furnace of claim 1 , wherein the liquid coolant inlet tube and liquid coolant outlet tube are coaxial.
9. The crystal growth furnace of claim 8 , wherein the liquid coolant inlet tube is inside the liquid coolant outlet tube.
10. The crystal growth furnace of claim 8 , wherein the liquid coolant outlet tube is inside the liquid coolant inlet tube.
11. The crystal growth furnace of claim 1 , wherein the liquid coolant inlet tube and liquid coolant outlet tube are enclosed in an insulation sheath within the furnace.
12. The crystal growth furnace of claim 11 , wherein the insulation sheath is made of graphite or alumina.
13. The crystal growth furnace of claim 1 , wherein the liquid-cooled heat exchanger is vertically movable into thermal contact with the crucible.
14. The crystal growth furnace of claim 1 , wherein the crucible sits atop a crucible support and the liquid-cooled heat exchanger is vertically movable into thermal contact with the crucible support.
15. The crystal growth furnace of claim 14 , wherein the crucible support comprises an opening that is sized and shaped to receive the heat extraction bulb and the heat extraction bulb is vertically movable into the opening.
16. The crystal growth furnace of claim 1 , wherein the crucible sits in a crucible box atop a crucible support and the liquid-cooled heat exchanger is vertically movable into thermal contact with the crucible support.
17. The crystal growth furnace of claim 16 , wherein the crucible support comprises an opening that is sized and shaped to receive the heat extraction bulb and the heat extraction bulb is vertically movable into the opening.
18. The crystal growth furnace of claim 1 , wherein the liquid-cooled heat exchanger is in a sealed tubular outer jacket.
19. The crystal growth furnace of claim 18 , wherein the liquid-cooled heat exchanger is vertically movable within the sealed tubular outer jacket into thermal communication with the crucible.
20. The crystal growth furnace of claim 18 , wherein the crucible sits atop a crucible support and the liquid-cooled heat exchanger is vertically movable within the sealed tubular outer jacket into thermal communication with the crucible support.
21. The crystal growth furnace of claim 20 , wherein the crucible support comprises an opening that is sized and shaped to receive the sealed tubular outer jacket.
22. The crystal growth furnace of claim 18 , wherein the crucible sits in a crucible box atop a crucible support and the liquid-cooled heat exchanger is vertically movable within the sealed tubular outer jacket into thermal communication with the crucible support.
23. The crystal growth furnace of claim 22 , wherein the crucible support comprises an opening that is sized and shaped to receive the sealed tubular outer jacket.
24. The crystal growth furnace of claim 18 , wherein the sealed tubular outer jacket comprises molybdenum or graphite.
25. The crystal growth furnace of claim 18 , wherein the sealed tubular outer jacket comprises a vacuum inlet port, an inert gas injection port and an over-pressure release valve outside the crystal growth furnace.
26. The crystal growth furnace of claim 18 , wherein the sealed tubular outer jacket further comprises an inert gas.
27. The crystal growth furnace of claim 18 , wherein the sealed tubular outer jacket is stationary.
28. The crystal growth furnace of claim 18 , wherein the sealed tubular outer jacket is vertically movable.
29. The crystal growth furnace of claim 18 , wherein the sealed tubular outer jacket is a crucible support shaft.
30. The crystal growth furnace of claim 1 , wherein the feedstock material comprises polycrystalline silicon.
31. The crystal growth furnace of claim 1 , wherein the crystalline ingot is silicon.
32. A method for producing a crystalline ingot in a crystal growth furnace, comprising:
placing a crucible having at least feedstock material in the crystal growth furnace;
circulating a liquid coolant through a liquid-cooled heat exchanger that is vertically movable beneath the crucible, wherein the liquid-cooled heat exchanger comprises a heat extraction bulb made of a material having a thermal conductivity value of greater than about 200 W/(m·k) and has a melting point below a melting point of the feedstock material in the crucible, a liquid coolant inlet tube and a liquid coolant outlet tube, wherein the liquid coolant inlet tube, the liquid coolant outlet tube, or both are attached to the heat extraction bulb for circulating the liquid coolant therethrough;
heating and melting the at least feedstock material in the crucible; and
vertically moving the liquid-cooled heat exchanger into thermal communication with the crucible in order to promote the growth of the crystalline ingot.
33. The method of claim 32 , wherein vertically moving the liquid-cooled heat exchanger is controlled by feedback obtained by monitoring the melting of the at least feedback material.
34. The method of claim 32 , wherein the liquid-cooled heat exchanger is enclosed in a sealed tubular outer jacket, and wherein the method further comprises the steps of evacuating the sealed tubular outer jacket and backfilling with inert gas before the step of heating and melting the at least feedstock in the crucible.
35. The method of claim 32 , wherein inert gas is backfilled to at least about 5-15 psig.