Nitrogen-free ozone generating unit

1. A nitrogen-free ozone generating unit, comprising:

a nitrogen-free ozone generator comprising a photocatalytic material for generating ozone on a discharge surface and is configured to generate an ozone gas;

an ozone power source supplying high voltage to said nitrogen-free ozone generator; and

a controller associated with said ozone generator,

wherein:

said controller comprises:

a flow rate detection/adjusting unit comprising a mass flow controller configured to control a raw-material-gas flow rate supplied to said nitrogen-free ozone generator; and

a pressure detecting/adjusting unit comprising an auto pressure controller configured to automatically control an internal pressure that is a pressure inside said nitrogen-free ozone generator;

said nitrogen-free ozone generating unit has an integrated structure of said nitrogen-free ozone generator, said ozone power source, and said controller;

said nitrogen-free ozone generator further comprises:

a high-voltage terminal configured to receive said high voltage from said ozone power source;

a cooling medium inlet/outlet for supplying and discharging a low-temperature cooling medium having a temperature of 15° C. or less that is obtained from outside;

a high voltage electrode to which said high voltage is applied via said high-voltage terminal and that has at least one primary surface defined as said discharge surface;

a photocatalyst layer made of said photocatalytic material and provided on said discharge surface side of said high voltage electrode;

a cooling path part provided in a vicinity of said high voltage electrode and configured to allow circulation of said cooling medium supplied therein via said cooling medium inlet/outlet;

an accommodating part configured to accommodate therein said high voltage electrode, said photocatalyst layer, and said cooling path, said cooling medium inlet/outlet being formed in a predetermined constituent surface constituting part of a peripheral portion of said accommodating part, and said high-voltage terminal being provided to pass through said peripheral portion of said accommodating part;

a heat insulating layer made of a heat insulating material and formed to cover at least said predetermined constituent surface of said accommodating part, such that the heat insulating layer directly contacts said predetermined constituent surface;

a raw material gas inlet part for supplying a raw material gas from outside via said flow rate detection/adjusting means; and

an ozone gas outlet part for outputting a generated ozone gas to outside via said pressure detecting/adjusting means;

said raw material gas inlet part and said ozone gas outlet part are formed in said predetermined constituent surface, and said high-voltage terminal is formed to pass through said predetermined constituent surface; and

said heat insulating layer is formed to selectively cover and directly contact only said predetermined constituent surface.

2. The nitrogen-free ozone generating unit according to claim 1 , wherein said cooling medium comprises a low-temperature cooling medium whose temperature when supplied to said accommodating part of said nitrogen-free ozone generator is able to be set to 5° C. or less, and is configured to cool said nitrogen-free ozone generator.

3. The nitrogen-free ozone generating unit according to claim 1 , further comprising a high-voltage terminal accommodating part configured to accommodate a primary portion of said high-voltage terminal in a predetermined space,

wherein said high-voltage terminal accommodating part comprises a purge gas supply inlet capable of supplying a purge gas to a predetermined space from outside, said purge gas adapted to have a dew point low enough to prevent condensation.

4. The nitrogen-free ozone generating unit according to claim 2 , further comprising a high-voltage terminal accommodating part configured to accommodate a primary portion of said high-voltage terminal in a predetermined space,

wherein said high-voltage terminal accommodating part comprises a purge gas supply inlet capable of supplying a purge gas to a predetermined space from outside, said purge gas adapted to have a dew point low enough to prevent condensation.

5. The nitrogen-free ozone generating unit according to claim 1 , wherein the heat insulating layer does not cover or directly contact the high-voltage terminal.

6. The nitrogen-free ozone generating unit according to claim 3 , wherein the heat insulating layer does not cover or directly contact the high-voltage terminal accommodating part.

7. A nitrogen-free ozone generating unit, comprising:

a nitrogen-free ozone generator comprising a photocatalytic material for generating ozone on a discharge surface and is configured to generate an ozone gas;

an ozone power source supplying high voltage to said nitrogen-free ozone generator; and

a controller associated with said ozone generator,

wherein:

said controller comprises:

a flow rate detection/adjusting unit comprising a mass flow controller configured to control a raw-material-gas flow rate supplied to said nitrogen-free ozone generator; and

a pressure detecting/adjusting unit comprising an auto pressure controller configured to automatically control an internal pressure that is a pressure inside said nitrogen-free ozone generator;

said nitrogen-free ozone generating unit has an integrated structure of said nitrogen-free ozone generator, said ozone power source, and said controller; and

said nitrogen-free ozone generator further comprises:

a high-voltage terminal configured to receive said high voltage from said ozone power source;

a cooling medium inlet/outlet for supplying and discharging a low-temperature cooling medium having a temperature of 15° C. or less that is obtained from outside;

a high voltage electrode to which said high voltage is applied via said high-voltage terminal and that has at least one primary surface defined as said discharge surface;

a photocatalyst layer made of said photocatalytic material and provided on said discharge surface side of said high voltage electrode;

a cooling path part provided in a vicinity of said high voltage electrode and configured to allow circulation of said cooling medium supplied therein via said cooling medium inlet/outlet;

an accommodating part configured to accommodate therein said high voltage electrode, said photocatalyst layer, and said cooling path, said cooling medium inlet/outlet being formed in a predetermined constituent surface constituting part of a peripheral portion of said accommodating part, and said high-voltage terminal being provided to pass through said peripheral portion of said accommodating part; and

a heat insulating layer made of a heat insulating material and formed to cover at least said predetermined constituent surface of said accommodating part, such that the heat insulating layer directly contacts said predetermined constituent surface; and

said heat insulating layer is formed to cover and directly contact substantially an entire surface of said peripheral portion of said accommodating part.

8. The nitrogen-free ozone generating unit according to claim 7 , further comprising a high-voltage terminal accommodating part configured to accommodate a primary portion of said high-voltage terminal in a predetermined space,

wherein said high-voltage terminal accommodating part comprises a purge gas supply inlet capable of supplying a purge gas to a predetermined space from outside, said purge gas adapted to have a dew point low enough to prevent condensation.

9. The nitrogen-free ozone generating unit according to claim 7 , wherein the heat insulating layer does not cover or directly contact the high-voltage terminal.

10. The nitrogen-free ozone generating unit according to claim 8 , wherein the heat insulating layer does not cover or directly contact the high-voltage terminal accommodating part.