Method for producing an optoelectronic component, and optoelectronic component
View Patent ↗A method for producing an optoelectronic component may include forming a first electrode on a substrate, forming an organic functional layer structure on the first electrode; forming a second electrode on the organic functional layer structure, forming at least one contact for making contact with the first and/or second electrode, forming an encapsulation layer above the layer structure and the contact, removing the encapsulation layer above the contact with the aid of an anisotropic etching method, and cooling the substrate during the anisotropic etching method.
1. A method for producing an optoelectronic component, the method comprising:
forming a first electrode on a substrate;
forming an organic functional layer structure on the first electrode;
forming a second electrode on the organic functional layer structure;
forming at least one contact for making contact with the first and/or second electrode;
forming an encapsulation layer above the layer structure and the contact;
applying a lacquer to the encapsulation layer above and/or alongside the layer structure so that the lacquer serves as an etching stop for the layer structure and/or a flank of the layer structure during anisotropic etching;
removing the encapsulation layer above the contact with the aid of an anisotropic etching method; and
cooling the substrate during the anisotropic etching method.
2. A method for producing an optoelectronic component, the method comprising:
forming a first electrode on a substrate;
forming an organic functional layer structure on the first electrode;
forming a second electrode on the organic functional layer structure;
forming at least one contact for making contact with the first and/or second electrode;
forming an encapsulation layer above the layer structure and the contact and a further encapsulation layer on a rear side of the substrate facing away from the layer structure; and
applying a lacquer to the encapsulation layer above and/or alongside the layer structure so that the lacquer serves as an etching stop for the layer structure and/or a flank of the layer structure during anisotropic etching;
removing the encapsulation layer above the contact with the aid of an anisotropic etching method and removing the further encapsulation layer on the rear side with the aid of the anisotropic etching method or an additional anisotropic etching method.
3. The method as claimed in claim 1 , wherein the optoelectronic component is a light-emitting component.
4. The method as claimed in claim 3 , wherein the optoelectronic component is an organic light-emitting diode.
5. The method as claimed in claim 1 , wherein a dry etching method is carried out as the anisotropic etching method.
6. The method as claimed in claim 5 , wherein a physical or physical-chemical dry etching method is carried out as the dry etching method.
7. The method as claimed in claim 6 , wherein a plasma-enhanced etching method is carried out as the dry etching method.
8. The method as claimed in claim 7 , wherein an ICP plasma method is carried out as the dry etching method.
9. The method as claimed in claim 1 , wherein a cover is fixed above the layer structure on the encapsulation layer with the aid of an adhesive, said cover serving as an etching stop for the encapsulation layer above the layer structure during the anisotropic etching method.
10. The method as claimed in claim 1 , wherein the contact is embodied such that it serves as its own etching stop and/or as an etching stop for the substrate during the anisotropic etching method.
11. The method as claimed in claim 1 , wherein at least the encapsulation layer is embodied as two or more partial layers above the layer structure and the contact, and wherein the partial layers above the contact are removed with the aid of the anisotropic etching method.
12. An optoelectronic component embodied with the aid of a method, the method comprising:
forming a first electrode on a substrate;
forming an organic functional layer structure on the first electrode;
forming a second electrode on the organic functional layer structure;
forming at least one contact for making contact with the first and/or second electrode;
forming an encapsulation layer above the layer structure and the contact;
applying a lacquer to the encapsulation layer above and/or alongside the layer structure so that the lacquer serves as an etching stop for the layer structure and/or a flank of the layer structure during anisotropic etching;
removing the encapsulation layer above the contact with the aid of an anisotropic etching method; and
cooling the substrate during the anisotropic etching method.
13. The method as claimed in claim 2 , wherein the optoelectronic component is a light-emitting component.
14. The method as claimed in claim 13 , wherein the optoelectronic component is an organic light-emitting diode.
15. The method as claimed in claim 2 , wherein a dry etching method is carried out as the anisotropic etching method.
16. The method as claimed in claim 15 , wherein a physical or physical-chemical dry etching method is carried out as the dry etching method.
17. The method as claimed in claim 16 , wherein a plasma-enhanced etching method is carried out as the dry etching method.
18. The method as claimed in claim 17 , wherein an ICP plasma method is carried out as the dry etching method.
19. The method as claimed in claim 2 , wherein a cover is arranged above the layer structure on the encapsulation layer, said cover serving as an etching stop for the encapsulation layer above the layer structure during the anisotropic etching method.
20. The method as claimed in claim 19 , wherein the cover is fixed with the aid of adhesive.
21. The method as claimed in claim 20 , wherein the adhesive serves as an etching stop for the encapsulation layer above the layer structure during the anisotropic etching method.
22. The method as claimed in claim 20 , wherein the adhesive is applied such that it covers at least one flank of the layer structure and thus serves as an etching stop for the corresponding flank during the anisotropic etching method.
23. The method as claimed in claim 2 , wherein a lacquer is applied above and/or alongside the layer structure in such a way that the lacquer serves as an etching stop for the layer structure and/or a flank of the layer structure during the anisotropic etching method.
24. The method as claimed in claim 2 , wherein the contact is embodied such that it serves as its own etching stop and/or as an etching stop for the substrate during the anisotropic etching method.
25. The method as claimed in claim 2 , wherein at least the encapsulation layer is embodied as two or more partial layers above the layer structure and the contact, and wherein the partial layers above the contact are removed with the aid of the anisotropic etching method.
26. An optoelectronic component embodied with the aid of a method, the method comprising:
forming a first electrode on a substrate;
forming an organic functional layer structure on the first electrode;
forming a second electrode on the organic functional layer structure;
forming at least one contact for making contact with the first and/or second electrode;
forming an encapsulation layer above the layer structure and the contact and a further encapsulation layer on a rear side of the substrate facing away from the layer structure; and
applying a lacquer to the encapsulation layer above and/or alongside the layer structure so that the lacquer serves as an etching stop for the layer structure and/or a flank of the layer structure during anisotropic etching;
removing the encapsulation layer above the contact with the aid of an anisotropic etching method and removing the further encapsulation layer on the rear side with the aid of the anisotropic etching method or an additional anisotropic etching method.