Gate valve
A gate valve is provided with a main body, and a sealing member which comes into contact with the peripheral edge of a gate when the gate valve is closed. The sealing member includes a protruding first section and a protruding second section which are disposed to extend along the peripheral edge of the main body and protrude from the primary surface when the gate valve is open. A protrusion amount of the first section from the primary surface is greater than a protrusion amount of the second section from the primary surface. The first section is disposed inner to the inner periphery of the primary surface than the second section.
1. A gate valve provided to a gate allowing a workpiece to enter or leave a chamber, comprising:
a main body which has a primary surface; and
a sealing member which comes into contact with a peripheral edge of said gate when said gate valve is closed,
said sealing member including a protruding first section and a protruding second section both which are disposed to extend along a peripheral edge of said main body and protrude from said primary surface when said gate valve is open,
a protrusion amount of said first section from said primary surface being greater than a protrusion amount of said second section from said primary surface,
said first section being disposed inwardly from the second section with respect to a peripheral edge of said primary surface, and
said second section having an outer peripheral sloping surface that slopes down from a top of the protruding amount of said second section towards the peripheral edge of said main body adjacent to said second section.
2. The gate valve according to claim 1 , wherein said second section comes into contact with the peripheral edge of said gate only when said gate valve is closed with a relatively high load.
3. The gate valve according to claim 1 , wherein an inclination angle of the outer peripheral sloping surface of said second section relative to the primary surface of said main body is greater than an inclination angle of an outer peripheral sloping surface of said first section relative to the primary surface of said main body.
4. The gate valve according to claim 1 , wherein the inclination angle of an outer peripheral sloping surface of said first section relative to the primary surface of said main body is smaller than an inclination angle of an inner peripheral sloping surface of said first section relative to the primary surface of said main body.
5. The gate valve according to claim 1 , wherein said first portion and said second portion are integrally formed of a single material, and wherein said sealing member has a flat bottom surface at a position corresponding to said first section and said second section.