Oscillation device
A vibration member ( 140 ) has a sheet shape. A piezoelectric element ( 130 ) is attached to one surface of the vibration member ( 140 ). A support member ( 110 ) supports the edge of the vibration member ( 140 ). The support member ( 110 ) includes a first facing portion ( 112 ) and a second facing portion ( 114 ). The first facing portion ( 112 ) faces the surface of the vibration member ( 140 ) to which the piezoelectric element ( 130 ) is attached. The second facing portion ( 114 ) faces the surface of the vibration member ( 140 ) which is located on the opposite side to the piezoelectric element ( 130 ). A first spring ( 152 ) is provided between the first facing portion ( 112 ) and the vibration member ( 140 ) or the piezoelectric element ( 130 ). A second spring ( 154 ) is provided between the second facing portion ( 114 ) and the vibration member ( 140 ).
1. An oscillation device comprising:
a sheet-like vibration member;
a piezoelectric element which is attached to one surface of the vibration member;
a support member that supports an edge of the vibration member;
a first facing portion, provided in the support member, which faces the one surface of the vibration member;
a second facing portion, provided in the support member, which faces a surface which is located on the opposite side to the one surface of the vibration member;
a first spring which is provided between the vibration member or the piezoelectric element and the first facing portion; and
a second spring which is provided between the vibration member and the second facing portion.
2. The oscillation device according to claim 1 , wherein three or more first springs are provided at positions which do not overlap each other when seen in a plan view, and
three or more second springs are provided at positions which do not overlap each other when seen in a plan view.
3. The oscillation device according to claim 1 , wherein the first spring is provided between the piezoelectric element and the first facing portion.
4. The oscillation device according to claim 3 , wherein an electrode is formed on a surface of the piezoelectric element which does not face the vibration member,
the first spring is formed of a conductive material, and
the oscillation device further includes a first interconnect connected to the first spring.
5. The oscillation device according to claim 1 , wherein the vibration member and the second spring are formed of a conductive material, and
the oscillation device further includes a second interconnect connected to the second spring.
6. The oscillation device according to claim 1 , wherein the first spring and the second spring overlap each other when seen in a plan view.
7. The oscillation device according to claim 6 , wherein spring constants of the first spring and the second spring are equal to each other.
8. The oscillation device according to claim 1 , wherein both the first spring and the second spring are coil springs or flat springs.