Biosensor and method for manufacturing same
View Patent ↗Disclosed is a method for manufacturing a biosensor comprising (a) forming an insulating layer in an electrode region; (b) coating the first photoresist layer on the insulating layer; (c) performing the first exposing process on the first electrode region through the first photomask; (d) removing unexposed area of the first photoresist layer except for the first electrode region using development; (e) coating the second photoresist layer on the first electrode region and the insulating layer after the step (d); (f) performing the second exposing process on the second electrode regions through the second photomask; (g) performing the third exposing process on the top portion of the second photoresist layer through a photomask with open areas in the shape of micro-sized wires connecting the second electrode regions; (h) removing the second photoresist layer except for the portions exposed in the steps (c), (f) and (g) using development.
1. A method for manufacturing a biosensor, comprising:
forming an insulating layer on a substrate;
coating a first photoresist on the insulating layer;
exposing a first electrode region of the first photoresist to ultraviolet light through a first photomask;
forming the first electrode region on the insulating layer by removing the first photoresist unexposed to ultraviolet light using development;
coating a second photoresist on the first electrode region and the insulating layer;
exposing a plurality of second electrode regions of the second photoresist to ultraviolet light through a second photomask;
exposing a portion of the second photoresist which connects the second electrode regions to ultraviolet light through a third photomask in the shape of micro-sized wires;
forming the second electrode regions, and the micro-sized wires connecting the second electrode regions by removing the second photoresist unexposed to ultraviolet light; and
pyrolyzing the first electrode region, the second electrode regions and the micro-sized wires to form carbon electrodes and carbon wires.
2. The method for manufacturing a biosensor of claim 1 , wherein the first electrode region is formed below the micro-sized wires connecting the second electrode regions.
3. The method for manufacturing a biosensor of claim 1 , wherein the carbon wires have a mesh shape or a honey comb shape.
4. The method for manufacturing a biosensor of claim 1 , wherein the first photoresist and the second photoresist are SU-8.
5. The method for manufacturing a biosensor of claim 1 , wherein a width of the carbon wires ranges from 30 nm to 10 μm, a height of the carbon wires from the substrate ranges from 100 nm to 10 μm, and a length of the carbon wires ranges from 1 μm to 900 μm.
6. A method for manufacturing a biosensor, comprising:
preparing a substrate made of an insulating material;
coating a first photoresist on the substrate;
exposing a first electrode region of the first photoresist to ultraviolet light through a primary photomask;
developing the first photoresist unexposed to ultraviolet light to form the first electrode region on the substrate;
coating a second photoresist on the first electrode region and the substrate;
exposing a plurality of second electrode regions of the second photoresist to ultraviolet light through a second photomask;
exposing a portion of the second photoresist which connects the second electrode regions to ultraviolet light through a third photomask in the shape of micro-sized wires;
forming the second electrode regions, and the micro-sized wires connecting the second electrode regions by removing the second photoresist unexposed to ultraviolet light; and
pyrolyzing the first electrode region, the second electrode regions and the micro-sized wires to form carbon electrodes and carbon wires.