Flow rate measuring device with first temperature sensor in a main passage and second temperature sensor in a sub-passage
View Patent ↗A flow rate measuring device with high precision is provided. The flow rate measuring device includes a sub-passage that takes a part of the fluid flowing in a main passage, first temperature measuring means for measuring a temperature of the fluid flowing in the passage, second temperature measuring means for measuring a temperature of a fluid flowing in the sub-passage, detecting means for detecting a flow rate of the fluid flowing in the sub-passage, and measuring means for measuring a flow rate of the fluid flowing within the main channel on the basis of an output of the first temperature measuring means, an output of the second temperature measuring means, and an output of the detecting means.
1. A flow rate measuring device comprising:
a sub-passage that takes a part of the fluid flowing in a main passage;
a sensor element that is disposed within the sub-passage;
a first temperature sensor that measures a temperature of the fluid flowing in the main passage;
a second temperature sensor that is disposed within the sub-passage; and
measuring means for measuring a flow rate of the fluid flowing in the main passage on the basis of an output of the first temperature sensor, an output of the second temperature sensor, and an output of the sensor element.
2. The flow rate measuring device according to claim 1 , further comprising:
a correction circuit that corrects an output of the sensor element on the basis of an output of the first temperature sensor and an output of the second temperature sensor.
3. The flow rate measuring device according to claim 2 ,
wherein the correction circuit includes:
deriving means for deriving a correction value based on a flow rate ratio of the main passage and the sub-passage on the basis of an output of the first temperature sensor and an output of the second temperature sensor; and
converting means for converting the output of the sensor element into the flow rate of the fluid flowing into the main passage on the basis of the correction value.
4. The flow rate measuring device according to claim 1 ,
wherein the sensor element includes a diaphragm formed on a semiconductor substrate, a heat generation resistor formed on the diaphragm, and temperature measuring resistors disposed upstream and downstream of the heat generation resistor in a flow of the fluid.
5. The flow rate measuring device according to claim 4 ,
wherein a sub-diaphragm is disposed on the semiconductor substrate, and
wherein the second temperature sensor is disposed on the sub-diaphragm.
6. The flow rate measuring device according to claim 5 ,
wherein the sensor element and the correction circuit are mounted on a lead frame,
wherein a sensor module in which the sensor element, the correction circuit, and the lead frame are integrally sealed by mold is formed,
wherein the sensor module has a mold opening portion so that the diaphragm is exposed to the fluid.
7. The flow rate measuring device according to claim 4 ,
wherein the sensor element and a correction circuit are mounted on a lead frame,
wherein a sensor module is formed by integrally sealing the sensor element, the correction circuit, and the lead frame in resin, and
wherein the sensor module has a mold opening portion so that the diaphragm is exposed to the fluid.
8. The flow rate measuring device according to claim 7 ,
wherein the second temperature sensor is disposed within the sensor module, and an irregular portion is disposed on the sensor module surface.
9. The flow rate measuring device according to claim 8 ,
wherein a sensor module surface of a portion on which the second temperature sensor is disposed is roughened.
10. The flow rate measuring device according to claim 4 ,
wherein the sub-passage has a bend, and the sensor element is disposed downstream of the bend in a flow of the fluid.
11. The flow rate measuring device according to claim 10 ,
wherein the second temperature sensor is located in the vicinity of the sensor element.
12. The flow rate measuring device according to claim 4 ,
wherein the sub-passage includes a first sub-passage having two or more opening portions that communicate with the main passage, and a second sub-passage having one or more opening portions that communicate with the first sub-passage, and the sensor element is disposed within the second sub-passage.
13. The flow rate measuring device according to claim 12 ,
wherein the one or more opening portions of the second sub-passage have an angle of 90 degrees or more to a main flow direction of the fluid flowing in the first sub-passage.
14. The flow rate measuring device according to claim 1 ,
wherein the first temperature sensor is arranged to be exposed to the fluid flowing in the main passage, and
wherein the second temperature sensor is arranged to be exposed to the fluid flowing in the sub-passage.
15. The flow rate measuring device according to claim 1 ,
wherein the first temperature sensor is arranged upstream of the second temperature sensor in the flow of the fluid.
16. A flow rate measuring device comprising:
a sub-passage that takes a part of the fluid flowing in a main passage;
a sensor element that is disposed within the sub-passage;
a first temperature sensor that measures a temperature of the fluid flowing in the main passage;
a second temperature sensor that is disposed within the sub-passage; and
measuring means for measuring a flow rate of the fluid flowing in the main passage on the basis of an output of the first temperature sensor, an output of the second temperature sensor, and an output of the sensor element, wherein
an air flow rate is measured on the basis of temperature information measured by the first temperature sensor and the second temperature sensor.