IP Library Granted Patent US 9,457,452
Granted Patent B2
US 9,457,452 · App. 14/370,923 · Granted Oct 4, 2016

Method for producing laminated polishing pad

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Quick Facts
Patent No.
US 9,457,452
App. No.
14/370,923
Granted
Oct 4, 2016
Kind
B2
Abstract

A method for producing a laminated polishing pad, which is free from warpage and does not cause peeling between a polishing layer and a cushion layer during polishing, includes the steps of: laminating a hot-melt adhesive sheet to a surface of a cushion layer with a base material in which a thermoplastic resin base material is provided peelably on one surface of the cushion layer, on which the thermoplastic resin base material is not provided; heating the laminated hot-melt adhesive sheet to be melted or softened; laminating a polishing layer on the melted or softened hot-melt adhesive to prepare a laminate; cutting the laminate to the size of the polishing layer to prepare a laminated polishing sheet; and peeling the thermoplastic resin base material from the laminated polishing sheet.

Claims (25)

1. A method for producing a laminated polishing pad comprising the following steps in this order:

laminating a hot-melt adhesive sheet to a surface of a cushion layer with a base material in which a thermoplastic resin base material is provided peelably on one surface of the cushion layer, on which the thermoplastic resin base material is not provided;

heating the laminated hot-melt adhesive sheet to be melted or softened;

laminating a polishing layer on the melted or softened hot-melt adhesive to prepare a laminate;

cutting the laminate to the size of the polishing layer to prepare a laminated polishing sheet; and

peeling the thermoplastic resin base material from the laminated polishing sheet.

2. The method for producing a laminated polishing pad according to claim 1 , wherein the laminated polishing sheet is prepared by cutting the laminate to the size of the polishing layer before the melted or softened hot-melt adhesive is completely cured.

3. The method for producing a laminated polishing pad according to claim 2 , wherein the thermoplastic resin base material is peeled from the laminated polishing sheet after the hot-melt adhesive is completely cured.

4. The method for producing a laminated polishing pad according to claim 1 , wherein the laminated polishing sheet is prepared by cutting the laminate to the size of the polishing layer when the temperature of the hot-melt adhesive is 40° C. or higher.

5. The method for producing a laminated polishing pad according to claim 1 , wherein the thermoplastic resin base material is formed by stretch forming.

6. The method for producing a laminated polishing pad according to claim 1 , wherein the melting temperature of the hot-melt adhesive is 140 to 170° C.

7. The method for producing a laminated polishing pad according to claim 1 , wherein the thermoplastic resin base material is a polyethylene terephthalate base material.

8. The method for producing a laminated polishing pad according to claim 1 , comprising the step of providing a pressure-sensitive double-sided tape, which has a pressure-sensitive adhesive layer on both surfaces of a thermoplastic resin sheet, on a surface of the cushion layer from which the thermoplastic resin base material is peeled.

9. A method for producing a laminated polishing pad comprising the following steps in this order:

applying a melted or softened hot-melt adhesive to a surface of a cushion layer with a base material in which a thermoplastic resin base material is provided peelably on one surface of the cushion layer, on which the thermoplastic resin base material is not provided;

laminating a polishing layer on the melted or softened hot-melt adhesive to prepare a laminate;

cutting the laminate to the size of the polishing layer to prepare a laminated polishing sheet; and

peeling the thermoplastic resin base material from the laminated polishing sheet.

10. The method for producing a laminated polishing pad according to claim 9 , wherein the laminated polishing sheet is prepared by cutting the laminate to the size of the polishing layer before the melted or softened hot-melt adhesive is completely cured.

11. The method for producing a laminated polishing pad according to claim 10 , wherein the thermoplastic resin base material is peeled from the laminated polishing sheet after the hot-melt adhesive is completely cured.

12. The method for producing a laminated polishing pad according to claim 9 , wherein the laminated polishing sheet is prepared by cutting the laminate to the size of the polishing layer when the temperature of the hot-melt adhesive is 40° C. or higher.

13. The method for producing a laminated polishing pad according to claim 9 , wherein the thermoplastic resin base material is formed by stretch forming.

14. The method for producing a laminated polishing pad according to claim 9 , wherein the melting temperature of the hot-melt adhesive is 140 to 170° C.

15. The method for producing a laminated polishing pad according to claim 9 , wherein the thermoplastic resin base material is a polyethylene terephthalate base material.

16. The method for producing a laminated polishing pad according to claim 9 , comprising the step of providing a pressure-sensitive double-sided tape, which has a pressure-sensitive adhesive layer on both surfaces of a thermoplastic resin sheet, on a surface of the cushion layer from which the thermoplastic resin base material is peeled.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 21, 2016
From: TOYO TIRE & RUBBER CO., LTD.
To: ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.
Reel/Frame 038053/0638 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 7, 2014
From: NAKAI, YOSHIYUKI
To: TOYO TIRE & RUBBER CO., LTD.
Reel/Frame 033253/0456 →