Substrate processing apparatus and heater cleaning method
A substrate processing apparatus includes a heater having an infrared lamp and a housing for heating an upper surface of a substrate held by a substrate holding mechanism with the heater in opposed relation to the upper surface. A heater cleaning method includes locating the heater at a position above a lower nozzle in opposed relation to a first spout of the lower nozzle, the lower nozzle being in opposed relation to a lower surface of the substrate held by the substrate holding mechanism, and a lower cleaning liquid spouting step of supplying a cleaning liquid to the lower nozzle to spout the cleaning liquid upward from the first spout with no substrate being held by the substrate holding mechanism to thereby supply the cleaning liquid to an outer surface of the housing of the heater located at the heater cleaning position.
1. A substrate treatment method executed by a substrate treatment apparatus, the substrate treatment apparatus including a substrate holder that holds a substrate in a horizontal posture, and a lower nozzle that spouts a cleaning liquid upwardly toward a lower surface of the substrate held by the substrate holder, the substrate treatment method comprising:
a step of holding a liquid film on an upper surface of the substrate held by the substrate holder;
a step of heating the liquid film concurrently with the liquid film holding step with a heater that has an infrared lamp that heats the liquid film, and a housing which has a bottom plate covering the infrared lamp from below and accommodates the infrared lamp, the liquid film heating step including a step of locating the heater at a liquid film heating position above the substrate held by the substrate holder in an opposed relation to the upper surface of the substrate;
a step of moving the heater, after the liquid film heating step, from above the substrate to a lateral side of the substrate holder;
a step of removing the substrate from the substrate holder after the liquid film holding step and the liquid film heating step;
a step of locating the heater at a heater cleaning position above the substrate holder after the substrate removing step; and
a step of supplying a cleaning liquid to the housing of the heater located at the heater cleaning position by spouting the cleaning liquid from the lower nozzle to the lower plate of the housing after the heater locating step.
2. The substrate treatment method according to claim 1 , wherein the cleaning liquid supplying step includes a step of spouting the cleaning liquid downward from an upper nozzle disposed above the substrate holder to supply the cleaning liquid to an outer surface of the housing concurrently with spouting the cleaning liquid from the lower nozzle.
3. The substrate treatment method according to claim 1 , further comprising a step of moving a liquid applying position to which the cleaning liquid spouted from the lower nozzle is applied on the bottom plate of the housing concurrently with the lower nozzle cleaning liquid spouting step.
4. The substrate treatment method according to claim 1 , further comprising a step of drying the housing by removing the cleaning liquid from the outer surface of the housing after completion of the cleaning liquid supplying step.
5. The substrate treatment method according to claim 4 , wherein the drying step includes a step of heating the housing by irradiating the housing with infrared radiation emitted from the infrared lamp to heat the outer surface of the housing so as to dry the outer surface.
6. The substrate treatment method according to claim 4 ,
wherein the substrate treatment apparatus further includes a second lower nozzle that spouts a drying gas upward,
wherein the drying step includes a step of spraying the drying gas upward from the second lower nozzle, whereby the drying gas is supplied to the outer surface of the housing of the heater located at the heater cleaning position.
7. The substrate treatment method according to claim 1 , wherein the heater cleaning position is higher than the liquid film heating position.
8. The substrate treatment method according to claim 1 , further comprising a step of horizontally moving the housing of the heater with respect to the lower nozzle concurrently with the lower nozzle cleaning liquid spouting step, thereby changing a liquid applying position to which the cleaning liquid spouted from the lower nozzle is applied on the bottom plate of the housing.