Laser light source device and method for manufacturing laser light source device
View Patent ↗The present invention is a laser light source device having: a silicon substrate having a first flat surface and a second flat surface which is formed at a position lower than the first flat surface by a level difference in the thickness direction; a first junction having a microbump structure comprising Au formed on the first flat surface; a second junction having a microbump structure comprising Au formed on the second flat surface; a first optical element and a second optical element for emitting laser light, which are joined to the first junction by a surface activation technique; a reflective member for reflecting the laser light from the first optical element toward a multiplexer, the reflective member being joined to the second junction by the abovementioned technique; and a multiplexer for directly receiving the laser light from the second optical element and multiplexing the laser light from the first optical element and the laser light from the second optical element, the multiplexer being joined to the second junction by the abovementioned technique; a configuration being adopted whereby the distance between the first optical element and the reflective member is different from the distance between the second optical element and the multiplexer, and the length of the optical path from the first optical element to the multiplexer is equal to the length of the optical path from the second optical element to the multiplexer.
1. A method for manufacturing a laser light source device, comprising the steps of:
forming a first planar surface and a second planar surface on a silicon substrate, said second planar surface being formed lower than said first planar surface by forming therebetween a step in a thickness direction of said silicon substrate;
forming a first bonding portion having a micro-bump structure made of Au on said first planar surface;
forming a second bonding portion having a micro-bump structure made of Au on said second planar surface;
bonding first and second optical elements to said first bonding portion by surface activated bonding, said first and second optical elements being arranged to emit laser light;
bonding an optical combiner to said second bonding portion by surface activated bonding, said optical combiner being positioned to directly receive the laser light from said second optical element and to combine the laser light from said second optical element with the laser light from said first optical element; and
adjusting the position of a reflecting member so that a light path of the laser light from said first optical element and a light path of the laser light from said second optical element overlap each other while emitting the laser light from said first and second optical elements after bonding said first optical element, said second optical element and said optical combiner; and
bonding said adjusted reflecting member to said second bonding portion by surface activated bonding, and
wherein a distance between said first optical element and said reflecting member is made different from a distance between said second optical element and said optical combiner so that a light path length from said first optical element to said optical combiner becomes equal to a light path length from said second optical element to said optical combiner.
2. The manufacturing method according to claim 1 , wherein said laser light source device further comprises a third optical element for emitting laser light and a second optical combiner for combining the laser light from said third optical element with the laser light from said second optical element combined by said optical combiner with the laser light from said first optical element, and
wherein in the step of adjusting the position of said reflecting member, the position of said reflecting member is adjusted so that a light path of the laser light from said second optical element combined by said optical combiner with the laser light from said first optical element and a light path of the laser light from said third optical element overlap each other.
3. The manufacturing method according to claim 1 , wherein said step formed in the thickness direction of said silicon substrate is formed in a staircase shape horizontally across said first planar surface, and wherein said first and second optical elements are arranged along staircase-shaped edge faces of said step formed in said thickness direction.
4. The manufacturing method according to claim 1 , wherein said first and second optical elements are laser devices, and said optical combiner is a dichroic mirror prism.
5. The manufacturing method according to claim 1 , further comprising the step of mounting on said silicon substrate a driver IC for driving said first and second optical elements.