Optical deflection element and optical deflection device
View Patent ↗An optical deflection element is provided with a substrate; an optical waveguide film made of an electro-optic medium, and constituting an optical waveguide formed on the substrate; a first electrode pair disposed on an incident side of the optical waveguide film at a position facing a film thickness direction of the optical waveguide film, and configured to deflect a light beam transmitting through the optical waveguide film in an in-plane direction of the optical waveguide film in accordance with a first applied voltage; and a second electrode pair disposed on an output side of the optical waveguide film at a position facing the film thickness direction of the optical waveguide film, and configured to deflect the light beam deflected in the in-plane direction of the optical waveguide film by the first electrode pair in the film thickness direction of the optical waveguide film in accordance with a second applied voltage. The second electrode pair includes a first electrode and a second electrode. The first electrode and the second electrode are formed to have lengths different from each other in a direction of travel of the light beam transmitting through the optical waveguide film.
1. An optical deflection element, comprising:
a substrate;
an optical waveguide film made of an electro-optic medium, and constituting an optical waveguide formed on the substrate;
a first electrode pair disposed on an incident side of the optical waveguide film at a position facing a film thickness direction of the optical waveguide film, and configured to deflect a light beam transmitting through the optical waveguide film in an in-plane direction of the optical waveguide film in accordance with a first applied voltage; and
a second electrode pair disposed on an output side of the optical waveguide film at a position facing the film thickness direction of the optical waveguide film, and configured to deflect the light beam deflected in the in-plane direction of the optical waveguide film by the first electrode pair in the film thickness direction of the optical waveguide film in accordance with a second applied voltage, wherein
the second electrode pair includes a first electrode and a second electrode, and
the first electrode and the second electrode are formed to have lengths different from each other in a direction of travel of the light beam transmitting through the optical waveguide film.
2. The optical deflection element according to claim 1 , wherein
a thickness of the optical waveguide film is not smaller than 1 μm but not larger than 10 μm.
3. The optical deflection element according to claim 1 , wherein
the first electrode and the second electrode are metal electrodes.
4. The optical deflection element according to claim 1 , wherein
the first electrode is disposed on a side of the substrate of the optical waveguide film,
the second electrode is disposed on an opposite side of the substrate of the optical waveguide film, and
a length of the first electrode in the direction of travel of the light beam transmitting through the optical waveguide film is longer than a length of the second electrode in the direction of travel.
5. The optical deflection element according to claim 1 , wherein
the first electrode is disposed on a side of the substrate of the optical waveguide film,
the second electrode is disposed on an opposite side of the substrate of the optical waveguide film, and
a length of the first electrode in the direction of travel of the light beam transmitting through the optical waveguide film is shorter than a length of the second electrode in the direction of travel.
6. The optical deflection element according to claim 1 , wherein
the first electrode is formed into a rectangular shape,
the second electrode is formed into a rectangular shape having a surface area smaller than a surface area of the rectangular shape of the first electrode, and
the first electrode and the second electrode form a quadrangular prism in an area of the optical waveguide film sandwiched between the first electrode and the second electrode by application of the second applied voltage, the quadrangular prism having a trapezoidal shape in cross section along the direction of travel of the light beam transmitting through the optical waveguide film.
7. The optical deflection element according to claim 6 , wherein
the first electrode is disposed on a side of the substrate of the optical waveguide film, and
the second electrode is disposed on an opposite side of the substrate of the optical waveguide film.
8. The optical deflection element according to claim 6 , wherein
the second electrode is disposed to face a middle area of the first electrode in the direction of travel of the light beam transmitting through the optical waveguide film.
9. The optical deflection element according to claim 1 , wherein
a refractive index of a prism area of the optical waveguide film sandwiched between the first electrode pair is changed by application of the first applied voltage to the first electrode pair, and
a refractive index of a prism area of the optical waveguide film sandwiched between the second electrode pair is changed by application of the second applied voltage to the second electrode pair.
10. The optical deflection element according to claim 1 , wherein
the first electrode pair is formed such that the electrode pair has a triangular shape identical to each other, and
the first electrode pair forms a triangular prism in an area of the optical waveguide film sandwiched between the first electrode pair by application of the first applied voltage.
11. The optical deflection element according to claim 1 , wherein
the first electrode and the second electrode form a prism area in an area of the optical waveguide film sandwiched between the first electrode and the second electrode by application of the second applied voltage, the prism area having a refractive index different from a refractive index of the optical waveguide film before application of the second applied voltage,
the prism area includes a first boundary surface and a second boundary surface serving as a boundary between a portion of the optical waveguide film devoid of the prism area, and the prism area,
the first boundary surface and the second boundary surface are inclined with respect to the film thickness direction of the optical waveguide film, and
a light beam to be incident on the prism area is deflected in the film thickness direction of the optical waveguide film on the first boundary surface, and is deflected in the film thickness direction of the optical waveguide film on the second boundary surface.
12. The optical deflection element according to claim 1 , wherein
the substrate has a refractive index smaller than a refractive index of the optical waveguide film.
13. The optical deflection element according to claim 1 , wherein
each of the first electrode pair and the second electrode pair has a refractive index smaller than a refractive index of the optical waveguide film.
14. The optical deflection element according to claim 1 , wherein
each of the first electrode pair and the second electrode pair is a plurality of pairs of electrodes.
15. The optical deflection element according to claim 1 , further comprising:
a clad layer formed between the optical waveguide film and the first electrode pair, and between the optical waveguide film and the second electrode pair.
16. The optical deflection element according to claim 1 , wherein
the electro-optic medium forming the optical waveguide film has a composition represented by KTa 1-x Nb x O 3 (where x is 0<x<1).
17. An optical deflection device, comprising:
a light source;
the optical deflection element of claim 1 which deflects light incident from the light source;
an optical system provided on at least one of the light incident side and the light output side of the optical deflection element; and
a drive device which applies the first applied voltage and the second applied voltage to the optical deflection element for driving the optical deflection element.