Light emitting element manufacturing method, light emitting element and display panel
View Patent ↗A method of manufacturing a light-emitting element. The method includes forming an underlayer that includes a reflective electrode, forming a bank that has liquid repellency, irradiating the bank with characteristic energy rays to decrease liquid repellency of the bank, and forming a functional layer. The bank is formed on the underlayer and is provided with an opening and an inclined portion surrounding the opening. The opening has a shape that has a long axis and a short axis and is positioned above the reflective electrode. In plan view, end sections of the inclined portion in a direction of the long axis overlap the upper surface of the reflective electrode, while central sections of the inclined portion in the direction of the long axis do not overlap the upper surface of the reflective electrode.
1. A method of manufacturing a light-emitting element, comprising:
forming an underlayer on a substrate, the underlayer including a reflective electrode;
forming, on the underlayer, a bank having liquid repellency and provided with an opening and an inclined portion surrounding the opening, the opening having a shape that has a long axis and a short axis and being positioned above the reflective electrode;
radiating energy rays from above the bank towards the bank, the energy rays being transmitted through the bank, being reflected upwards at an upper surface of the reflective electrode, and causing the liquid repellency of the bank to decrease; and
forming, on the underlayer, a functional layer within the opening, wherein
in forming the bank, in plan view, end sections of the inclined portion in a direction of the long axis overlap the upper surface of the reflective electrode, while central sections of the inclined portion in the direction of the long axis do not overlap the upper surface of the reflective electrode.
2. The method of claim 1 , wherein
in forming the underlayer, a side surface of the reflective electrode, contiguous with the upper surface of the reflective electrode, is formed to be an inclined surface, and
in forming the bank, the central sections of the inclined portion are formed so as to overlap, in plan view, the side surface of the reflective electrode.
3. The method of claim 2 , wherein
in forming the underlayer, the side surface of the reflective electrode is formed to have an angle of inclination with respect to an upper surface of the substrate no less than 20° and no greater than 70°.
4. The method of claim 1 , wherein
in forming the bank, the central sections of the inclined portion are formed so as not to overlap, in plan view, the upper surface or a side surface of the reflective electrode, the side surface of the reflective electrode being contiguous with the upper surface of the reflective electrode.
5. The method of claim 4 , wherein
in forming the underlayer, the side surface of the reflective electrode is formed to be substantially perpendicular with respect to an upper surface of the substrate.
6. The method of claim 1 , wherein
in forming the underlayer, a light-transmissive electrode is formed to be located below the opening so as to entirely overlap, in plan view, a lowest end of the shape of the opening.