Component for plasma processing apparatus and method for manufacturing component for plasma processing apparatus
View Patent ↗The present invention provides a component for a plasma processing apparatus, the component comprising: a base material; an underlayer covering a surface of the base material; and an yttrium oxide film covering a surface of the underlayer, wherein the underlayer comprises a metal oxide film having a thermal conductivity of 35 W/m·K or less, the yttrium oxide film contains at least either particulate portions made of yttrium oxide or non-particulate portions made of yttrium oxide, the particulate portions being portions where a grain boundary demarcating an outer portion of the grain boundary is observed under a microscope, and the non-particulate portions being portions where the grain boundary is not observed under a microscope, the yttrium oxide film has a film thickness of 10 μm or more and a film density of 96% or more, and when a surface of the yttrium oxide film is observed under a microscope, an area coverage ratio of the particulate portions is 0 to 20% in an observation range of 20 μm×20 μm and an area coverage ratio of the non-particulate portions is 80 to 100% in the observation range.
1. A component for a plasma processing apparatus, the component comprising:
a base material;
an underlayer covering a surface of the base material, and the underlayer comprising at least one selected from yttrium oxide, aluminum oxide, rare earth oxides, zirconium oxide, hafnium oxide, niobium oxide, and tantalum oxide; and
an yttrium oxide film covering a surface of the underlayer, the yttrium oxide film being formed by spraying an unmolten yttrium oxide base powder at a surface of the underlayer, and by sintering and bonding the yttrium oxide base powder thereby to deposit the sintered and bonded particles on the underlayer,
wherein the underlayer comprises a metal oxide film having a thermal conductivity of 35 W/m·K or less,
the yttrium oxide film contains at least either particulate portions made of yttrium oxide or non-particulate portions made of yttrium oxide, the particulate portions being portions where a grain boundary demarcating an outer portion of the grain boundary is observed under a microscope, and the non-particulate portions being portions where the grain boundary is not observed under a microscope,
the yttrium oxide film has a film thickness of 10 μm or more and a film density of 96% or more,
the yttrium oxide film has a surface roughness of 3 μm or less in terms of arithmetic average surface roughness Ra, and
the yttrium oxide film has a peak value ratio Im/Ic of 0.2 to 0.6, where a peak value of the strongest peak of a cubic crystal is denoted by Ic and a peak value of the strongest peak of a monoclinic crystal is denoted by Im, each obtained by XRD analysis, and
wherein a surface of the yttrium oxide film has an area coverage ratio of the particulate portions that is 0 to 20% in an observation range of 20 μm×20 μm and an area coverage ratio of the non-particulate portions that is 80 to 100% in the observation range.
2. The component for a plasma processing apparatus according to claim 1 , wherein the underlayer has a film density within a range of 85 to 98%.
3. The component for a plasma processing apparatus according to claim 1 , wherein the underlayer has a film thickness within a range of 40 to 300 μm.
4. The component for a plasma processing apparatus according to claim 1 , wherein the yttrium oxide film has a film thickness of 10 to 200 μm and a film density of 99 to 100%.
5. The component for a plasma processing apparatus according to claim 1 , wherein the yttrium oxide film has an area coverage ratio of the non-particulate portions of the yttrium oxide film is 95 to 100%.