IP Library Granted Patent US 9,478,707
Granted Patent B2
US 9,478,707 · App. 14/405,632 · Granted Oct 25, 2016

Method of manufacturing structures of LEDs or solar cells

Inventor: Pascal Guenard (Froges, FR)
Assignee: Soitec
H01L33/32H01L27/142H01L27/153H01L31/02008H01L31/03044H01L31/075H01L31/1844H01L31/1892H01L33/007H01L33/0075H01L33/0079H01L33/44H01L27/156H01L33/20H01L2224/18H01L2933/0016Y02E10/548
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Quick Facts
Patent No.
US 9,478,707
App. No.
14/405,632
Filed
Dec 4, 2014
Granted
Oct 25, 2016
Kind
B2
Examiner
TRAN, TAN N
Art Unit
2826
USPC
438/28
Abstract

The disclosure relates to a manufacturing method comprising the formation of elemental LED or photovoltaic structures on a first substrate, each comprising at least one p-type layer, an active zone and an n-type layer, formation of a first planar metal layer on the elemental structures, provision of a transfer substrate comprising a second planar metal layer, assembly of the elemental structures with the transfer substrate by bonding of the first and second metal layers by molecular adhesion at room temperature, and removal of the first substrate.

Claims (22)

1. A manufacturing method, comprising:

a) forming a plurality of LED or photovoltaic elemental structures on a first substrate, each of the LED or photovoltaic elemental structures comprising at least one p-type layer, an active zone and an n-type layer;

b) forming a planar first metal layer on the elemental structures;

c) providing a transfer substrate comprising a planar second metal layer on a surface of the transfer substrate;

d) assembling the elemental structures with the transfer substrate by bonding of the first metal layer and the second metal layer, the bonding being carried out by molecular adhesion at room temperature; and

e) removing the first substrate; and

wherein the elemental structures on the first substrate are spaced apart from each other by trenches;

wherein the manufacturing method further comprises depositing an insulating material in the trenches present between the elemental structures between step a) and step b); and

wherein step a) further comprises forming each of the elemental structures on an island of relaxed or partially relaxed material.

2. The manufacturing method of claim 1 , wherein the relaxed or partially relaxed material is InGaN.

3. The manufacturing method of claim 2 , further comprising, before step b), forming a p- or n-type electrical contact pad on an exposed surface of each of the elemental structures.

4. The manufacturing method of claim 3 , wherein step b) further comprises polishing a surface of the first metal layer so as to obtain a surface roughness less than or equal to 1 nm RMS, and wherein step c) further comprises polishing a surface of the second metal layer so as to obtain a surface roughness less than or equal to 1 nm RMS.

5. The manufacturing method of claim 4 , further comprising, between steps d) and e), an annealing step at a temperature less than or equal to 100° C.

6. The manufacturing method of claim 5 , wherein each of the first metal layer and the second metal layer comprises a material selected from the group consisting of Cu, Al, Ti and W.

7. The manufacturing method of claim 1 , wherein the elemental structures formed in step a) are photovoltaic structures each comprising at least one p-n junction.

8. The manufacturing method of claim 1 , wherein the elemental structures formed in step a) are LED structures wherein said active zone is a light-emitting layer.

9. The manufacturing method of claim 1 , further comprising, after step e), cutting the transfer substrate and separating the elemental structures.

10. The manufacturing method of claim 1 , further comprising, before step b), forming a p- or n-type electrical contact pad on an exposed surface of each of the elemental structures.

11. The manufacturing method of claim 1 , steps b) and c) each comprising a sub-step of respective polishing of said first and second metal layers so as to obtain a surface roughness less than or equal to 1 nm RMS.

12. The manufacturing method of claim 1 , wherein step b) further comprises polishing a surface of the first metal layer so as to obtain a surface roughness less than or equal to 1 nm RMS, and wherein step c) further comprises polishing a surface of the second metal layer so as to obtain a surface roughness less than or equal to 1 nm RMS.

13. The manufacturing method of claim 12 , further comprising, between steps d) and e), an annealing step at a temperature less than or equal to 100° C.

14. The manufacturing method of claim 1 , wherein each of the first metal layer and the second metal layer comprises a material selected from the group consisting of Cu, Al, Ti and W.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 11, 2015
From: GUENARD, PASCAL
To: SOITEC
Reel/Frame 035143/0268 →
Priority Claims (3)
FR 12 55931 · Jun 22, 2012 · national
FR 12 55934 · Jun 22, 2012 · national
FR 12 57617 · Aug 6, 2012 · national
Continuity (1)
Related Publication 20150115290A1 · Apr 30, 2015