Method for producing a multi-layer component and multi-layer component
A method for producing a multilayer component ( 21 ) is specified, which involves providing a body having dielectric layers ( 3 ) arranged one above another and first and second electrically conductive layers ( 4, 84, 5, 85 ) arranged therebetween. The first conductive layers ( 4, 84 ) are connected to a first auxiliary electrode ( 6 ) and the second conductive layers ( 5, 85 ) are connected to a second auxiliary electrode ( 7 ). The body ( 1, 81 ) is introduced into a medium and a voltage is applied between the first and second auxiliary electrodes ( 6, 7 ) for producing a material removal. Furthermore, a multilayer component is specified, which has depressions ( 20 ) formed by an electrochemically controlled material removal.
1. A method for producing a multilayer component comprising the following steps:
A) providing a body having dielectric layers arranged one above another and first and second electrically conductive layers alternatingly arranged therebetween,
wherein the first conductive layers are connected to a first auxiliary electrode and the second conductive layers are connected to a second auxiliary electrode; and
B) introducing at least one part of the body into a medium and applying a voltage between the first and second auxiliary electrodes in order to produce a material removal from at least one of the first and second electrically conductive layers,
wherein the material removal is a single-stage etching process,
wherein in the single-stage etching process, depressions are introduced at two side surfaces of the body, and
wherein the first conductive layers are completely removed in the single-stage etching process.
2. The method according to claim 1 , wherein applying the voltage effects a material transport between the first and second electrically conductive layers.
3. The method according to claim 1 , wherein at least one of the electrically conductive layers is etched in an electrically controlled manner or coated in an electrically controlled manner by applying a voltage.
4. The method according to claim 1 , wherein in step B) a third auxiliary electrode is introduced into the medium.
5. The method according to claim 1 , wherein the body is sintered before being introduced into the medium.
6. The method according to claim 1 , wherein at least the first conductive layer contains copper.
7. The method according to claim 1 , wherein the medium comprises iron (III) chloride, sodium persulfate or copper chloride.
8. The method according to claim 1 , wherein, in at least one stage of the material removal, a positive potential is applied to the first auxiliary electrode and a negative potential is applied to the second auxiliary electrode.
9. The method according to claim 1 , wherein the first and second conductive layers in the multilayer component serve as electrodes.
10. The method according to claim 1 , wherein the first conductive layers in the multilayer component have no function as electrodes.
11. The method according to claim 1 , wherein the body has third conductive layers, which are connected to the second auxiliary electrode, and
wherein the third conductive layers have a different geometry than the second conductive layers.
12. The method according to claim 11 , wherein the second and third conductive layers in the multilayer component serve as electrodes.
13. The method according to claim 1 , comprising the following further step:
C) removing the auxiliary electrodes.
14. The method according to claim 1 , comprising the following further step:
D) separating the body into a plurality of main bodies for multilayer components.