Reducing or eliminating nanopipe defects in III-nitride structures
View Patent ↗Embodiments of the invention include a III-nitride light emitting layer disposed between an n-type region and a p-type region, a III-nitride layer including a nanopipe defect, and a nanopipe terminating layer disposed between the III-nitride light emitting layer and the III-nitride layer comprising a nanopipe defect. The nanopipe terminates in the nanopipe terminating layer.
1. A device comprising:
a III-nitride light emitting layer disposed between an n-type region and a p-type region;
a III-nitride layer comprising GaN islands coalesced into a smooth film, and a nanopipe defect disposed at a boundary between two GaN islands; and
a nanopipe terminating layer disposed between the III-nitride light emitting layer and the III-nitride layer comprising a nanopipe defect, wherein the nanopipe terminates in the nanopipe terminating layer.
2. The device of claim 1 wherein the nanopipe terminating layer comprises aluminum.
3. The device of claim 2 wherein the nanopipe terminating layer contains magnesium.
4. The device of claim 1 wherein the nanopipe terminating layer comprises a superlattice, the superlattice comprising a plurality of alternating first and second layers.
5. The device of claim 4 wherein the first layers are GaN and the second layers are Al x Ga 1-x N where 0<x≦1.
6. The device of claim 4 wherein the first layers are Al b Ga 1-b N and the second layers are Al c Ga 1-c N, wherein b≠c.
7. The device of claim 1 wherein the III-nitride light emitting layer is spaced at least 1 micron from the nanopipe terminating layer.
8. The device of claim 1 wherein the nanopipe terminating layer is electrically connected in common with the n-type layer.
9. The device of claim 1 wherein the nanopipe terminating layer comprises part of an electrostatic discharge protection circuit.