Method for filling at least one cavity of a multi-layer component with a filling material, and multi-layer component

1. A method for filling at least one cavity ( 5 a , 5 b ) of a multi-layer component ( 1 ) with filling material ( 9 ), comprising the following steps:

A) providing a main body ( 2 ) of the multi-layer component ( 1 ), the main body ( 2 ) having at least one cavity ( 5 a , 5 b ),

B) placing the main body ( 2 ) in a chamber ( 11 ),

C) generating a first pressure, the first pressure being a negative pressure,

D) arranging the filling material ( 9 ) on the main body ( 2 ).

2. The method according to claim 1 , comprising the following step:

increasing the pressure in the chamber ( 11 ) to a second pressure after the main body ( 2 ) has been arranged in the filling material ( 9 ).

3. The method according to claim 2 , wherein the pressure is increased by aerating the chamber ( 11 ).

4. The method according to either of claims 2 and 3 , wherein the second pressure is an excess pressure.

5. The method according to claim 2 , wherein filling material ( 9 ) is pressed into the at least one cavity ( 5 a , 5 b ) by the increase in the pressure.

6. The method according to claim 1 , wherein the filling material ( 9 ) has a viscosity of between 200 mPas and 2000 mPas.

7. The method according to claim 1 , comprising the following step:

curing the filling material ( 9 ).

8. The method according to claim 1 , wherein the at least one cavity ( 5 a , 5 b ) is produced by an etching method.

9. The method according to claim 1 , wherein the at least one cavity ( 5 a , 5 b ) has a width of between 1 μm and 5 μm.

10. The method according to claim 1 , wherein the main body ( 2 ) has at least one internal electrode layer ( 20 a , 20 b ), and wherein the at least one cavity ( 5 a , 5 b ) is arranged in a plane with the at least one internal electrode layer ( 20 a , 20 b ).

11. The method according to claim 1 , wherein the main body ( 2 ) has at least one outer contact-making means ( 3 a , 3 b ), which is arranged on an outer side ( 6 a , 6 b ) of the main body and which at least partially covers the at least one cavity ( 5 a , 5 b ).

12. The method according to claim 11 , wherein a diaphragm ( 17 ) is arranged at least partially over the at least one cavity ( 5 a , 5 b ).

13. The method according to claim 12 , wherein the diaphragm ( 17 ) together with the outer contact-making means ( 3 a , 3 b ) covers a continuous region on the outer side ( 6 a , 6 b ) of the main body ( 2 ), and wherein, in a region which lies next to the outer contact-making means ( 3 a , 3 b ), the diaphragm ( 17 ) has a width ( 18 ) which is greater than the width ( 19 ) of a region of the outer side ( 6 a , 6 b ) covered continuously by the outer contact-making means.

14. A multi-layer component comprising:

a main body ( 2 ) with at least one cavity ( 5 a , 5 b ),

wherein the cavity ( 5 a , 5 b ) is filled with a filling material ( 9 ) which has a viscosity of between 200 mPas and 2000 mPas,

wherein the at least one cavity ( 5 a , 5 b ) has a width of between 1 μm and 5 μm, and

wherein the filling material ( 9 ) is free of air bubbles.