Highly transparent aluminum nitride single crystalline layers and devices made therefrom
The invention provides highly transparent single crystalline AlN layers as device substrates for light emitting diodes in order to improve the output and operational degradation of light emitting devices. The highly transparent single crystalline AlN layers have a refractive index in the a-axis direction in the range of 2.250 to 2.400 and an absorption coefficient less than or equal to 15 cm-1 at a wavelength of 265 nm. The invention also provides a method for growing highly transparent single crystalline AlN layers, the method including the steps of maintaining the amount of Al contained in wall deposits formed in a flow channel of a reactor at a level lower than or equal to 30% of the total amount of aluminum fed into the reactor, and maintaining the wall temperature in the flow channel at less than or equal to 1200° C.
1. A highly transparent single crystalline AlN layer having a refractive index in the a-axis direction in the range of 2.250 to 2.400 and an absorption coefficient less than or equal to 15 cm −1 at a wavelength of 265 nm.
2. The highly transparent single crystalline AlN layer of claim 1 , the single crystalline AlN layer having a refractive index in the c-axis direction larger than the refractive index in the a-axis direction, wherein the difference between the refractive indices is in the range of 0.05 to 0.15 at a wavelength of 265 nm.
3. The highly transparent single crystalline AlN layer of claim 1 , the single crystalline AlN layer having a density of defects, originating from inclusions with maximum outer diameter ranging from 1 to 200 μm, of less than or equal to 50 cm −2 , and wherein the principal surface area is larger than or equal to 100 mm 2 , and wherein the thickness of the single crystalline AlN layer ranges from 0.05 to 2.0 mm.
4. The highly transparent single crystalline AlN layer of claim 1 , wherein the sum of Si, O, C, and B impurity concentrations is less than or equal to 1×10 19 cm 3 .
5. The highly transparent single crystalline AlN layer of claim 1 , wherein said layer is formed by hydride vapor phase epitaxy.
6. A stack of layers comprising at least one highly transparent single crystalline AlN layer according to claim 1 , which is deposited on a base substrate with an AlN single crystalline surface.
7. The stack of layers of claim 6 , where the average lattice constant of the AlN single crystalline substrate and that of the at least one highly transparent single crystalline AlN layer are represented by a 1 and a 2 , respectively, and wherein the value indicated by is |a 1 −a 2 |/a 1 less than or equal to 90 ppm.
8. A light emitting diode (LED) comprising a highly transparent single crystalline AlN layer according to claim 1 as a device substrate.
9. A method for growing highly transparent single crystalline AlN layers, comprising:
supplying an aluminum chloride gas from a supply nozzle and a nitrogen precursor gas from a supply nozzle to a reactor having walls, wherein a portion of the walls of the reactor form a flow channel segment defined as the walls of the reactor from 200 mm upstream to 200 mm downstream of the location of a tip of the aluminum chloride gas supply nozzle; and
reacting the aluminum chloride gas with the nitrogen precursor gas on a substrate in the reactor in order to grow an AlN single crystalline layer on the substrate; and
supplying a carrier gas to the flow channel of the reactor and directing the carrier gas toward the substrate, the carrier gas being supplied around the supply nozzles for the aluminum chloride gas and the nitrogen precursor gas, wherein the carrier gas passes through a baffle plate comprising a plurality of holes;
wherein, during the reacting step, the amount of aluminum contained in wall deposits formed in the flow channel segment is maintained at a level lower than or equal to 30% of the total amount of aluminum fed into the reactor, and wherein the wall temperature in the flow channel is maintained at less than or equal to 1200° C.