Method for manufacturing solid electrolytic capacitor, and solid electrolytic capacitor
A method for manufacturing a solid electrolytic capacitor with excellent ESR properties and a solid electrolytic capacitor. A method for manufacturing a solid electrolytic capacitor, wherein an anode body is obtained by forming a dielectric oxide film on the surface of a sintered body that is formed by sintering a molded body formed of a valve acting metal powder or on the surface of a roughened valve acting metal foil, and a solid electrolyte layer is formed on the surface of the anode body. This method for manufacturing a solid electrolytic capacitor is characterized by steps for forming a solid electrolyte layer including a protrusion forming process where protrusions formed of manganese dioxide and having an average diameter of 10˜102 nm are formed on the surface of the dielectric oxide coating film so that the protrusions are scattered about like islands and the surface coverage is 1˜20% and a conductive polymer layer forming process where a conductive polymer layer is formed on the surfaces of the projections and the dielectric oxide coating film.
1. A solid electrolytic capacitor comprising:
a sintered molded body formed of a valve acting metal powder;
a dielectric oxide film formed on the sintered body;
a solid electrolytic layer formed on the surface of the dielectric oxide film, wherein the solid electrolytic layer comprises protrusions that cover 1 to 20% of the surface of the dielectric film and have an average diameter of 10 to 102 nanometers, wherein the protrusions include manganese dioxide, and wherein the solid electrolytic layer further comprises a conductive polymer layer formed on a surface of the protrusions and the dielectric oxide film.
2. The solid electrolytic capacitor of claim 1 , wherein the conductive polymer layer includes a polymer formed by chemical polymerization.
3. The solid electrolytic capacitor of claim 1 , wherein the sintered molded body includes tantalum.
4. The solid electrolytic capacitor of claim 1 , wherein the conductive polymer layer includes a polymer of 3,4-ethylene dioxythiophene or a derivative thereof.
5. The solid electrolytic capacitor of claim 1 , wherein the protrusions have an average diameter of 10 to 54 nanometers.
6. The solid electrolytic capacitor of claim 1 , wherein the protrusions are scattered on the film in the form of islands.
7. A method for forming a solid electrolytic capacitor, the method comprising forming a solid electrolytic layer on a sintered molded body formed of a valve acting metal powder, wherein a dielectric oxide film is formed on the sintered body, wherein the solid electrolytic layer is formed by a process that comprises forming protrusions that cover 1 to 20% of the surface of the dielectric film and have an average diameter of 10 to 102 nanometers, wherein the protrusions include manganese dioxide, and forming a conductive polymer layer on a surface of the protrusions and the dielectric oxide film.
8. The method of claim 7 , wherein the conductive polymer layer includes a polymer formed by chemical polymerization.
9. The method of claim 7 , wherein the sintered molded body includes tantalum.
10. The method of claim 7 , wherein the conductive polymer layer includes a polymer of 3,4-ethylene dioxythiophene or a derivative thereof.
11. The method of claim 7 , wherein the protrusions have an average diameter of 10 to 54 nanometers.
12. The method of claim 7 , wherein the protrusions are scattered on the film in the form of islands.
13. The method of claim 7 , further comprising performing a reforming process between formation of the protrusions and the conductive polymer layer.
14. The method of claim 7 , wherein the protrusions are formed by a process that includes pretreating the anode body in a humid environment and thereafter immersing the anode body in a manganese nitrate solution.
15. The method of claim 14 , wherein the anode body is heat treated after being pretreated in the humid environment but prior to being immersed in the manganese nitrate solution.
16. The method of claim 14 , wherein the manganese nitrate solution includes a surfactant.
17. The method of claim 14 , wherein the humid environment has a humidity of 8 g/m 3 or greater.
18. The method of claim 14 , wherein the humid environment has a specific relative humidity of 50% to 80%.