IP Library Granted Patent US 10,229,768
Granted Patent B2
US 10,229,768 · App. 14/425,112 · Granted Mar 12, 2019

Method for manufacturing graphene layer

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Quick Facts
Patent No.
US 10,229,768
App. No.
14/425,112
Granted
Mar 12, 2019
Kind
B2
Abstract

A method of manufacturing graphene, the method including: preparing a carrier member on which the graphene is formed on one surface thereof; exposing the graphene to dopant vapor to dope the graphene; transferring the doped graphene onto a target member; and removing the carrier member.

Claims (35)

1. A method of manufacturing graphene, the method comprising the following steps in order:

preparing a carrier member on which the graphene is formed on one surface thereof;

exposing a first surface of the graphene to dopant vapor to dope the graphene;

transferring the doped graphene onto a target member so that the first surface of the graphene faces the target member; and

removing the carrier member.

2. The method of claim 1 , wherein the preparing of the carrier member on which the graphene is formed on one surface thereof comprises:

forming the graphene on two surfaces of a catalyst metal;

forming the carrier member on the graphene that is formed on one surface of the catalyst metal; and

removing the catalyst metal.

3. The method of claim 2 , further comprising removing the graphene formed on an other surface of the catalyst metal before the removing of the catalyst metal.

4. The method of claim 2 , wherein the catalyst metal comprises at least one selected from the group consisting of nickel (Ni) and copper (Cu).

5. The method of claim 2 , wherein the catalyst metal is removed by wet etching.

6. The method of claim 1 , further comprising forming a protection member on the exposed graphene after the removing of the carrier member.

7. The method of claim 1 , wherein the carrier member is a heat-releasable film.

8. The method of claim 1 , wherein the target member is formed of a material that is formed according to a roll-to-roll method, and the target member comprises at least one selected from the group consisting of polyethylene terephthalate (PET), polyimide (PI), polycarbonate, and polymethyl methacrylate (PMMA).

9. The method of claim 1 , wherein the dopant vapor is composed of a volatile doping solution that is vaporized.

10. The method of claim 9 , wherein the doping solution comprises at least one selected from the group consisting of gold(III) chloride (AuCl3), nitric acid (HNO3), and hydrochloric acid (HCl).

11. The method of claim 1 , wherein the doping of the graphene is performed in a sealed space.

12. A method of manufacturing a graphene film, the method comprising the following steps in order:

preparing a roll-type heat-releasable film in which the graphene film is formed on one surface thereof;

exposing a first surface of the graphene film to dopant vapor to dope the graphene film;

transferring the doped graphene film onto a roll-type target film so that the first surface of the graphene faces the roll-type target film; and

removing the heat-releasable film,

wherein the steps are performed in one direction according to a roll-to-roll method.

13. The method of claim 12 , wherein the preparing of the heat-releasable film in which the graphene film is formed on one surface thereof comprises:

forming the graphene film on two surfaces of a roll-type catalyst metal film;

forming the heat-releasable film on the graphene film that is formed on one surface of the catalyst metal film;

removing the graphene film formed on an other surface of the catalyst metal film; and

removing the catalyst metal film,

wherein the steps are performed in one direction according to a roll-to-roll method.

14. The method of claim 12 , further comprising forming a roll-type protection film on the exposed graphene film after the removing of the heat-releasable film, wherein the forming of the roll-type protection film is performed in one direction according to a roll-to-roll method.

15. The method of claim 12 , wherein the dopant vapor is composed of a volatile doping solution that is vaporized by using a vaporizer.

16. The method of claim 15 , wherein the doping solution comprises at least one selected from the group consisting of gold(III) chloride (AuCl3) nitric acid (HNO3), and hydrochloric acid (HCl).

17. The method of claim 15 , wherein in the dopant vapor, some dopant vapor that is not doped on the graphene film is liquefied by using a cooler to thus become the doping solution.

18. The method of claim 15 , wherein the doping of the graphene film is performed in a sealed space.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 18, 2020
From: HANWHA AEROSPACE CO., LTD.
To: VERSARIEN PLC
Reel/Frame 054688/0968 →
CHANGE OF NAME Recorded Jun 15, 2018
From: HANWHA TECHWIN CO., LTD.
To: HANWHA AEROSPACE CO., LTD.
Reel/Frame 046366/0429 →
CHANGE OF NAME Recorded Jul 24, 2015
From: SAMSUNG TECHWIN CO., LTD.
To: HANWHA TECHWIN CO., LTD.
Reel/Frame 036254/0911 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 2, 2015
From: YOON, JONG-HYUK
To: SAMSUNG TECHWIN CO., LTD.
Reel/Frame 035064/0751 →