Optoelectronic component with a layer structure
An optoelectronic component includes a layer structure which has a first gallium nitride layer and an aluminum-containing nitride intermediate layer. In this case, the aluminum-containing nitride intermediate layer adjoins the first gallium nitride layer. The layer structure has an undoped second gallium nitride layer which adjoins the aluminum-containing nitride intermediate layer.
1. A nitride semiconductor component comprising a layer structure having a first gallium nitride layer and an aluminum-containing nitride intermediate layer,
wherein the aluminum-containing nitride intermediate layer adjoins the first gallium nitride layer,
the layer structure has an undoped second gallium nitride layer adjoining the aluminum-containing nitride intermediate layer,
the layer structure has a third gallium nitride layer,
the third gallium nitride layer has a silicon doping which is variable perpendicular to the layer plane,
the third gallium nitride layer adjoins the second gallium nitride layer,
doping of the third gallium nitride layer increases proceeding from an interface with the second gallium nitride layer,
the layer structure has a fourth gallium nitride layer,
the fourth gallium nitride layer has a silicon doping,
the fourth gallium nitride layer adjoins the third gallium nitride layer,
the layer structure comprises an LED layer structure adjoining the fourth gallium nitride layer, and
a proportion of aluminum increases throughout the aluminum-containing nitride intermediate layer in a direction of the undoped second gallium nitride layer.
2. The nitride semiconductor component according to claim 1 , wherein the undoped second gallium nitride layer has a thickness of 30 nm to 2000 nm.
3. The nitride semiconductor component according to claim 1 , wherein the third gallium nitride layer has a thickness of 20 nm to 500 nm.
4. The nitride semiconductor component according to claim 1 , wherein the first gallium nitride layer has a thickness of 500 nm to 2000 nm.
5. The nitride semiconductor component according to claim 1 , further comprising a masking layer comprising silicon nitride embedded into the first gallium nitride layer.
6. The nitride semiconductor component according to claim 1 , wherein the aluminum-containing nitride intermediate layer has a thickness of 5 nm to 100 nm.
7. The nitride semiconductor component according to claim 1 , wherein the proportion of aluminum in the aluminum-containing nitride intermediate layer is at least doubled between the first gallium nitride layer and the undoped second gallium nitride layer.
8. The nitride semiconductor component according to claim 1 , wherein the layer structure has a plurality of first gallium nitride layers and aluminum-containing nitride intermediate layers which alternately follow one another.
9. The nitride semiconductor component according to claim 1 , wherein the layer structure is arranged on a silicon substrate.
10. A nitride semiconductor component comprising a layer structure having a first gallium nitride layer and an aluminum-containing nitride intermediate layer,
wherein the aluminum-containing nitride intermediate layer adjoins the first gallium nitride layer,
the layer structure has an undoped second gallium nitride layer adjoining the aluminum-containing nitride intermediate layer,
the layer structure has a third gallium nitride layer,
the third gallium nitride layer has a silicon doping which is variable perpendicular to the layer plane,
the third gallium nitride layer adjoins the second gallium nitride layer,
doping of the third gallium nitride layer increases proceeding from an interface with the second gallium nitride layer,
the layer structure has a fourth gallium nitride layer,
the fourth gallium nitride layer has a silicon doping,
the fourth gallium nitride layer adjoins the third gallium nitride layer,
the layer structure comprises an LED layer structure adjoining the fourth gallium nitride layer,
the fourth gallium nitride layer has a thickness of 1000 nm to 3000 nm, and
a proportion of aluminum increases throughout the aluminum-containing nitride intermediate layer in a direction of the undoped second gallium nitride layer.