Thermal flow meter
In configurations in which a circuit element is connected in parallel with a resistor, it is difficult to detect a break in the two wires. A thermal flow meter includes a heating element and a temperature controlling bridge circuit that is formed of a plurality of resistors and controls the temperature of the heating element. The thermal flow meter includes: a circuit element connected in parallel with at least one resistor configuring the temperature controlling bridge circuit through two wires drawn from both ends of the resistor; a voltage detection circuit that detects that the magnitude of voltage produced between the two wires has become smaller than a first predetermined value; and a fault signal output circuit that, when it is detected at the voltage detection circuit that the. magnitude of the voltage has become smaller than the first predetermined value, outputs a signal indicating a fault.
1. A thermal flow meter comprising:
a sensor element portion including:
a heating element;
a temperature detecting bridge circuit that includes a plurality of resistors and is configured to detect a temperature of the heating element, wherein at least one of the plurality of resistors is a balance adjusting resistor that has a resistance value that varies according to the temperature of the heating element; and
an integrated circuit including:
a tapped adjusting resistor connected in parallel with the balance adjusting resistor of the temperature detecting bridge circuit by two wires drawn from both ends of the balance adjusting resistor to take out an end to end voltage thereof whereby the thermal flow meter operates inaccurately by not taking out the end to end voltage of the balance adjusting resistor when one of the two wires is broken;
a voltage detection circuit that detects that the magnitude of voltage produced between the two wires has become smaller than a first predetermined value; and
a fault signal output circuit that, when the magnitude of the voltage is detected to become smaller than the first predetermined value at the voltage detection circuit, outputs a signal indicating a break of at least one of the two wires.
2. The thermal flow meter according to claim 1 , wherein the fault signal output circuit outputs a signal indicating a fault through an output signal line for outputting a flow rate signal.
3. The thermal flow meter according to claim 2 , wherein the fault signal output circuit brings the output signal line to the ground potential or the supply voltage and outputs a signal indicating a fault.
4. The thermal flow meter according to claim 2 , wherein the fault signal output circuit uses a digital value out of a range of numeric values indicating a flow rate to output a signal indicating a fault.
5. The thermal flow meter according to claim 2 , wherein the temperature detecting bridge circuit is provided with a power supply that applies a drive voltage having a constant voltage value.
6. The thermal flow meter according to claim 2 ,
wherein the voltage detection circuit has a second predetermined value larger than the first predetermined value as the value of voltage produced between the two wires, and
wherein the fault signal output circuit outputs a signal indicating a fault when the voltage detected at the voltage detection circuit has a voltage value larger than the second predetermined value.
7. The thermal flow meter according to claim 2 , comprising:
a circuit that, when the magnitude of voltage produced between the two wires is detected to become smaller than the first predetermined value at the voltage detection circuit, brings the drive voltage of the heating element to a low voltage.