Method for manufacturing a semiconductor device
The improvement of the reliability of a semiconductor device having a split gate type MONOS memory is implemented. An ONO film and a second polysilicon film are sequentially formed so as to fill between a first polysilicon film and a dummy gate electrode. Then, the dummy gate electrode is removed. Then, the top surfaces of the first and second polysilicon films are polished, thereby to form a memory gate electrode formed of the second polysilicon film at the sidewall of a control gate electrode formed of the first polysilicon film via the ONO film. As a result, the memory gate electrode high in perpendicularity of the sidewall, and uniform in film thickness is formed.
1. A semiconductor device comprising:
(a) a semiconductor substrate;
(b) a capacitor element formed over the semiconductor substrate,
the capacitor element (b) including:
(b1) a first conductor film formed over the semiconductor substrate, the first conductor film having a first portion extending in a first direction, and a plurality of second portions extending in a second direction traversing the first direction and connecting to the first portion;
(b2) a second conductor film formed over the semiconductor substrate, the second conductor film being buried between the second portions disposed next to each other; and
(b3) a first insulating film formed over the semiconductor substrate and disposed between the first conductor film and the second conductor film such that the first conductor film and the second conductor film are insulated from each other.
2. The semiconductor device according to claim 1 ,
wherein the plurality of second portions of the first conductor film includes at least three second portions, and
wherein the second conductor film has a third portion extending in the first direction, and a plurality of fourth portions extending in the second direction and connecting to the third portion.
3. The semiconductor device according to claim 1 ,
wherein the semiconductor device further comprises a third conductor film formed of the same layer as that of the first conductor film and separated from the first conductor film,
wherein the second conductor film further having a fifth portion surrounding the third conductor film, and
wherein the semiconductor device further comprises a first plug formed over both the second conductor film and the third conductor film and electrically coupled to the second conductor film.
4. The semiconductor device according to claim 1 ,
wherein the first insulating film includes a first silicon oxide film, a silicon nitride film and a second silicon oxide film.
5. The semiconductor device according to claim 1 ,
wherein the semiconductor device further comprises an element isolation region formed over the semiconductor substrate, and
wherein the capacitor element formed over the element isolation region.
6. The semiconductor device according to claim 1 ,
wherein the second conductor film has no portion which is higher than the first conductor film.