Process for producing laminate, and laminate
View Patent ↗A laminate which contains a transparent substrate, a unit layer formed on the transparent substrate, and a tin zinc oxide layer formed on the unit layer. The unit layer contains a dielectric layer, a metal layer, a barrier layer, and a dielectric layer in this order starting from the transparent substrate side, and the dielectric layers contain substantially no carbon. The tin zinc oxide layer contains an oxide of tin and zinc as the main component and further contains carbon in an amount of at least 0.1 atomic % to the total amount of tin and zinc.
1. A laminate which comprises:
a transparent substrate,
a unit layer formed on the transparent substrate, said unit layer comprising a first dielectric layer, a metal layer, a barrier layer, and a second dielectric layer in this order starting from the transparent substrate side, said first and second dielectric layers formed in a gas atmosphere in which a gas comprising no carbon substantially functions as an oxidizing gas, and
a tin zinc oxide layer formed directly on the second dielectric layer of the unit layer, said tin zinc oxide layer comprising an oxide of tin and zinc as the main component and further comprising carbon in an amount of at least 0.1 atomic % to the total amount of tin and zinc.
2. The laminate according to claim 1 , wherein the tin zinc oxide layer contains carbon in an amount of at least 0.1 atomic % and at most 10 atomic % to the total amount of tin and zinc.
3. The laminate according to claim 1 , wherein the tin zinc oxide layer contains tin in an amount of from 20 to 80 mass % to the total amount of tin and zinc.
4. The laminate according to claim 1 , wherein said first and second dielectric layers comprise no carbon.
5. The laminate according to claim 1 , further comprising a base layer comprising an oxide of tin and zinc as the main component and comprising carbon in an amount of at least 0.1 atomic % located between the transparent substrate and the unit layer closest to the transparent substrate.
6. The laminate according to claim 5 , wherein said first and second dielectric layers comprise no carbon.
7. The laminate according to claim 1 , comprising a plurality of said unit layers and a plurality of said tin zinc oxide layers, where a first unit layer is formed on the transparent substrate, a first tin zinc oxide layer is formed directly on the second dielectric layer of the first unit layer, a second unit layer is formed on the first tin zinc oxide layer, a second tin zinc oxide layer is formed directly on the second dielectric layer of the second unit layer, and repeating in this manner if more than two unit layers and more than two tin zinc oxide layers are present, wherein a final unit layer is formed on a next to final tin zinc oxide layer and a final tin zinc oxide layer is formed directly on the second dielectric layer of the final unit layer.
8. The laminate according to claim 7 , comprising 3 unit layers and 3 tin zinc oxide layers.
9. The laminate according to claim 7 , comprising 4 unit layers and 4 tin zinc oxide layers.
10. The laminate according to claim 7 , wherein said first and second dielectric layers comprise no carbon.