SUBSTRATE FOR THIN FILM MICROBATTERIES
A method for fabricating electrical storage cell including providing a photopolymer; providing a pre-patterned mask wherein the pre-patterned mask includes masked regions and unmasked regions; attaching the pre-patterned mask on top of the photopolymer; applying collimated ultraviolet radiation on the masked substrate wherein areas of the photopolymer underneath of the unmasked regions are solidified or cross linked and areas of the photopolymer underneath the masked are not solidified or cross linked to form an imaged substrate with perforated holes; developing the imaged substrate; cleaning residual material from the perforated holes; forming a thin film over the surface of a substrate area to define an anode, a cathode; and forming a solid electrolyte disposed between the anode and the cathode, wherein the thin film comprising a final layer which is formed so as to fill the perforated holes.
1 . A method for fabricating an electrical storage cell comprising:
providing a photopolymer substrate;
providing a pre-patterned mask wherein the pre-patterned mask comprises masked regions and unmasked regions;
attaching the pre-patterned mask on top of the photopolymer;
applying collimated ultraviolet radiation on the masked substrate wherein areas of the photopolymer underneath the unmasked regions are solidified or cross linked and areas of the photopolymer underneath the masked are not solidified or cross linked;
developing the imaged substrate;
cleaning residual material from the areas which are not solidified or cross linked to form perforated holes;
forming a thin film over the surface of substrate to define an anode;
forming a solid electrolyte on the anode; and
forming a thin film on the perforated holes to form a cathode.
2 . The method according to claim 1 wherein the photopolymer comprises a binder, a monomer, and a photo initiator.
3 . The method according to claim 2 wherein the binder is a thermoplastic elastomeric block copolymer.
4 . The method according to claim 3 wherein the thermoplastic elastomeric block copolymer may be made of a styrene butadiene styrene, a natural rubber or a styrene-isoprene.
5 . The method according to claim 2 wherein the photopolymer comprises acrylate such as isobornyl acrylate, 2-phenoxyethyl acrylate, or a hexane diol diacrylate.
6 . The method according to claim 2 wherein the photo initiator is ultra violet (UV) light triggered to start the photopolymer reaction and wherein the photo initiator may be made of a benzophenone or a benzoin.
7 . The method according to claim 1 wherein the pre patterned mask is formed by laser imaging.
8 . The method according to claim 1 wherein the cleaning of the perforated holes is performed by water jets, brushes, ultra sonic means or a combination thereof.