Substrate processing method and substrate processing apparatus
A substrate processing method includes an SPM supplying step of supplying SPM having high temperature to an upper surface of a substrate, a DIW supplying step of supplying, after the SPM supplying step, DIW having room temperature to the upper surface of the substrate to rinse off the liquid remaining on the substrate, a hydrogen peroxide water supplying step of supplying, after the SPM supplying step and before the DIW supplying step, hydrogen peroxide water of a liquid temperature lower than the temperature of the SPM and not less than room temperature, to the upper surface of the substrate in a state where the SPM remains on the substrate, and a temperature decrease suppressing step of supplying, in parallel to the hydrogen peroxide water supplying step, pure water having high temperature to a lower surface of the substrate.
1. A substrate processing method comprising:
a chemical liquid supplying step of supplying a chemical liquid having a first temperature to a major surface of a substrate;
a rinse liquid supplying step of supplying, after the chemical liquid supplying step, a rinse liquid having a second temperature lower than the first temperature to the major surface of the substrate to rinse off a liquid remaining on the substrate;
a reaction liquid supplying step of supplying, after the chemical liquid supplying step and before the rinse liquid supplying step, a reaction liquid, causing an exothermic reaction upon mixing with the chemical liquid and having a liquid temperature lower than the first temperature and not less than the second temperature, to the major surface of the substrate in a state where the chemical liquid supplied to the substrate in the chemical liquid supplying step remains on the substrate; and
a temperature decrease suppressing step of supplying, in parallel to the reaction liquid supplying step, a heating fluid having a temperature lower than the first temperature and higher than the liquid temperature of the reaction liquid to the other major surface of the substrate at an opposite side of the major surface of the substrate to which the chemical liquid is supplied in the chemical liquid supplying step,
wherein the temperature decrease suppressing step is started after the discharge of the chemical liquid onto the substrate in the chemical liquid supplying step is stopped.
2. The substrate processing method according to claim 1 , wherein
the reaction liquid supplying step includes a step of supplying the reaction liquid to the major surface of the substrate by causing a reaction liquid nozzle to discharge the reaction liquid from a plurality of discharge ports of the reaction liquid nozzle.
3. The substrate processing method according to claim 1 , wherein the reaction liquid is hydrogen peroxide water or pure water.
4. The substrate processing method according to claim 1 , wherein the reaction liquid supplying step includes a step of moving a liquid landing position of the reaction liquid with respect to the major surface of the substrate by moving a reaction liquid nozzle that discharges the reaction liquid, and
the temperature decrease suppressing step includes a step of moving a landing position of the heating fluid with respect to the other major surface of the substrate by moving a nozzle that discharges the heating fluid such that a difference between the distance from a center of the substrate to the liquid landing position of the reaction liquid and the distance from the center of the substrate to the landing position of the heating fluid is reduced.
5. The substrate processing method according to claim 4 , wherein the temperature decrease suppressing step includes a step of moving the landing position of the heating fluid with respect to the other major surface of the substrate by moving the nozzle that discharges the heating fluid such that the landing position of the heating fluid with respect to the other major surface of the substrate and the liquid landing position of the reaction liquid with respect to the major surface of the substrate opposes each other via the substrate, when the liquid landing position of the reaction liquid with respect to the major surface of the substrate is moved.
6. A substrate processing method comprising:
a chemical liquid supplying step of supplying a chemical liquid having a first temperature to a major surface of a substrate;
a rinse liquid supplying step of supplying, after the chemical liquid supplying step, a rinse liquid having a second temperature lower than the first temperature to the major surface of the substrate to rinse off a liquid remaining on the substrate;
a reaction liquid supplying step of supplying, after the chemical liquid supplying step and before the rinse liquid supplying step, a reaction liquid, causing an exothermic reaction upon mixing with the chemical liquid and having a liquid temperature lower than the first temperature and not less than the second temperature, to the major surface of the substrate in a state where the chemical liquid supplied to the substrate in the chemical liquid supplying step remains on the substrate; and
a temperature decrease suppressing step of supplying, in parallel to the reaction liquid supplying step, a heating fluid having a temperature lower than the first temperature and higher than the liquid temperature of the reaction liquid to the other major surface of the substrate at an opposite side of the major surface of the substrate to which the chemical liquid is supplied in the chemical liquid supplying step,
wherein the reaction liquid supplying step includes a step of moving a liquid landing position of the reaction liquid with respect to the major surface of the substrate by moving a reaction liquid nozzle that discharges the reaction liquid, and
the temperature decrease suppressing step includes a step of moving a landing position of the heating fluid with respect to the other major surface of the substrate by moving a nozzle that discharges the heating fluid such that a difference between the distance from a center of the substrate to the liquid landing position of the reaction liquid and the distance from the center of the substrate to the landing position of the heating fluid is reduced.
7. The substrate processing method according to claim 6 , wherein the temperature decrease suppressing step includes a step of moving the landing position of the heating fluid with respect to the other major surface of the substrate by moving the nozzle that discharges the heating fluid such that the landing position of the heating fluid with respect to the other major surface of the substrate and the liquid landing position of the reaction liquid with respect to the major surface of the substrate opposes each other via the substrate, when the liquid landing position of the reaction liquid with respect to the major surface of the substrate is moved.