Slab-mode and polarization clean-up in silicon photonics
View Patent ↗Disclosed are structures and methods directed to waveguide structures exhibiting improved device performance including improved attenuation of scattered light and/or transverse magnetic modes. In an illustrative embodiment according to the present disclosure, a rib waveguide structure including a rib overlying a slab waveguide (or superimposed thereon) is constructed wherein the slab waveguide is heavily doped at a distance from the rib which has a very low overlap with rib guided modes. Advantageously, such doping may be of the P-type or of the N-type, and dopants could be any of a number of known ones including—but not limited to—boron, phosphorous, etc.—or others that increase optical propagation loss. As may be appreciated, the doped regions advantageously absorb scattered light which substantially improves the structures' performance.
1. A rib waveguide structure comprising:
a slab waveguide; and
a rib formed upon a top surface of the slab waveguide, wherein the rib is configured to support a TE0 mode of light,
wherein the slab waveguide includes a first doped region and a second doped region not contacting the rib,
wherein the first doped region and the second doped region are spaced from the rib such that the rib waveguide structure is fully transparent to the TE0 mode of light, and
wherein the first doped region and the second doped region are spaced from the rib such that the rib waveguide structure is absorptive of a TM0 mode of light.
2. The rib waveguide structure of claim 1 , wherein the first doped region is spaced from the rib by 1-2 μm.
3. The rib waveguide structure of claim 2 , wherein the first doped region includes an N-type dopant.
4. The rib waveguide structure of claim 2 , further including a metal deposited upon the slab waveguide in contact with the first doped region.
5. The rib waveguide structure of claim 2 , wherein the first doped region includes a P-type dopant.
6. The rib waveguide structure according to claim 1 , wherein the first doped region is doped to a concentration of substantially 1×10 20 dopants/cm 3 .
7. The rib waveguide structure of claim 1 , wherein the first doped region and second doped region are separated by a third region of the slab waveguide having a different doping concentration than that of either the first doped region or the second doped region.
8. The rib waveguide structure of claim 1 , further comprising a first metal portion in direct contact with the first doped region and a second metal portion in direct contact with the second doped region.
9. The rib waveguide structure of claim 8 , further comprising a cladding layer contacting the slab waveguide, wherein the slab waveguide is disposed between the cladding layer and the rib.
10. The rib waveguide structure of claim 8 , wherein each of the first and second doped regions is doped to a concentration of substantially 1×10 20 dopants/cm 3 .
11. The rib waveguide structure of claim 8 , wherein the rib has a first edge substantially perpendicular to the slab waveguide, and wherein the first doped region is disposed substantially 1.5 microns from the first edge and the rib.
12. The rib waveguide structure of claim 1 , wherein the first doped region is spaced from the rib by 1-2 μm.
13. The rib waveguide structure of claim 1 , further including a metal deposited upon the slab waveguide in contact with the first doped region and lacking an electrical contact.
14. The rib waveguide structure of claim 1 , wherein the first doped region is doped to a concentration of substantially 1×10 20 dopants/cm 3 .
15. The rib waveguide structure of claim 1 , further comprising a cladding layer contacting the slab waveguide, wherein the slab waveguide is disposed between the cladding layer and the rib.
16. A rib waveguide structure comprising:
a slab waveguide; and
a rib formed upon a top surface of the slab waveguide, wherein the rib is configured to support a TE0 mode of light,
wherein the slab waveguide includes a first doped region and a second doped region not contacting the rib,
wherein the first doped region and the second doped region are spaced from the rib such that the rib waveguide structure is fully transparent to the TE0 mode of light, wherein said rib is substantially 0.07 μm thick, and substantially 0.55 μm wide and wherein the first doped region is substantially 1.5 μm from an edge of the rib.
17. The rib waveguide structure according to claim 16 , wherein said first doped region is substantially 2 μm in width and said slab waveguide is substantially 0.15 μm thick.