Chuck cleaner and cleaning method
According to one embodiment, a chuck cleaner includes a support, an adhesive layer, and a support substrate. The support includes a first portion, a second portion, and a third portion provided between the first portion and the second portion. The support substrate is provided between the support and the adhesive layer. The support substrate includes a first region fixed to the first portion, a second region fixed to the second portion, a third region provided between the first region and the second region and having variable distance from the third portion, a fourth region provided between the first region and the third region and separated from the support, and a fifth region provided between the second region and the third region and separated from the support.
1. A chuck cleaner comprising:
a support, the support including
first and second raised portions disposed at opposed perimeter portions thereof,
a plurality of-third raised portions, and
a plurality of recessed portions defined between respective adjacent third raised portions as well as between the first and the second raised portions and the third raised portions;
an adhesive layer; and
a support substrate provided between the support and the adhesive layer, peripheral portions of the support substrate being fixed to the first and second raised portions of the support, a bottom surface of an inner region of the support substrate being adapted to engage an upper surface of each of the third plurality of raised portions in a first orientation and be spaced from the upper surface of each of the third plurality of raised portions in a second orientation,
wherein
the adhesive layer is brought in contact with a foreign matter adhering to a chuck part, the adhesive layer is separated from the chuck part to move the foreign matter from the chuck part to the adhesive layer.
2. The cleaner according to claim 1 , wherein
the support substrate includes a first region fixed to the first raised portion, a second region fixed to the second raised portion, and a third region having variable distance from the third raised portions; and
a first distance between the third region and the third raised portions in a state where the adhesive layer is separated from the chuck part is longer than the first distance in a state where the adhesive layer and the chuck part are in contact with each other.
3. The cleaner according to claim 2 , wherein
the third raised portions have third ends contacting the third region, and
a position of the third ends in a first direction toward the first region from the first raised portion is variable.
4. The cleaner according to claim 1 , wherein
the support substrate includes a first region fixed to the first raised portion, a second region fixed to the second raised portion, and a third region having variable distance from the third raised portions;
the first raised portion has a first end contacting the first region,
the second raised portion has a second end contacting the second region,
the third raised portions has a third end contacting the third region,
a position in a first direction toward the first region from the first raised portion, of the third end is disposed between a position in the first direction of the first end and a position in the first direction of the adhesive layer, and
the position in the first direction of the third end is disposed between a position in the first direction of the second end and the position in the first direction of the adhesive layer.
5. The cleaner according to claim 1 , wherein
the support substrate includes a first region fixed to the first raised portion, a second region fixed to the second raised portion, and a third region having variable distance from the third raised portions;
the third raised portions have third ends contacting the third region, and a position of the third ends in a first direction toward the first region from the first raised portion is variable.
6. The cleaner according to claim 1 , wherein
the chuck part is a reticle chuck of an exposure device.
7. The cleaner according to claim 1 , wherein a plurality of protrusions including the first portion, the second raised portion and the third raised portions are provided on the support.
8. The cleaner according to claim 7 , wherein each of the protrusions is provided at an equal spacing.
9. A chuck cleaner comprising:
a support including
first and second raised portions disposed at opposed perimeter portions thereof,
a plurality of third raised portions, and
a plurality of recessed portions defined between respective adjacent third raised portions as well as between the first and second raised portions and the third raised portions;
an adhesive layer; and
a support substrate provided between the support and the adhesive layer, the support substrate comprising:
a first region fixed to the first raised portion,
a second region fixed to the second raised portion,
a third region provided between the first region and the second region and having variable distance from the third raised portions,
a fourth region provided between the first region and the third region and separated from the support,
a fifth region provided between the second region and the third region and separated from the support,
a peripheral portion fixed to the first and second raised portions, and
a bottom surface of an inner region adapted to engage an upper surface of each of the third plurality of raised portions in a first orientation and be spaced from the upper surface of each of the third plurality of raised portions in a second orientation;
the adhesive layer being brought in contact with a foreign matter adhering to a chuck part, the adhesive layer being separated from the chuck part to move the foreign matter from the chuck part to the adhesive layer.