Light emitting device and electronic apparatus
On a semiconductor substrate, a plurality of transistors that includes a drive transistor which controls a drive current according to a potential of a gate, a light emitting element that emits a light having a brightness corresponding to the drive current, and an element isolation portion that electrically isolates each transistor are formed. The element isolation portion has a structure in which an insulator fills inside of a groove formed on the semiconductor substrate.
1. A light emitting device comprising:
a semiconductor substrate including an n-type well that is disposed on the surface of a p-type substrate;
a plurality of transistors including a drive transistor which controls a drive current according to a potential of a gate, the plurality of transistors being formed on the semiconductor substrate;
a light emitting element that emits a light having a brightness corresponding to the drive current; and
an element isolation portion that isolates one transistor from another transistor among the plurality of transistors, the element isolation portion having a Shallow Trench Isolation structure formed in a partially removed region of the n-type well on the semiconductor substrate.
2. The light emitting device according to claim 1 ,
wherein the plurality of transistors includes a first transistor that sets the potential of the gate of the drive transistor according to a gradation potential, and
wherein the element isolation portion isolates the drive transistor from the first transistor.
3. The light emitting device according to claim 1 ,
wherein the plurality of transistors includes a second transistor that is disposed on a path of the drive current and controls a supply and cut-off of the drive current to the light emitting element, and
wherein the element isolation portion isolates the drive transistor from the second transistor.
4. The light emitting device according to claim 3 ,
wherein the plurality of transistors includes a third transistor that controls conduction between the gate and a drain of the drive transistor, and
wherein the element isolation portion isolates the drive transistor from the third transistor.
5. The light emitting device according to claim 1 ,
wherein each of the plurality of transistors includes a diffusion layer that functions as one of a source or the drain, and
wherein a thickness of the element isolation portion is greater than a thickness of the diffusion layer.
6. The light emitting device according claim 1 ,
wherein a width of the element isolation portion is greater than a channel width of one transistor among the plurality of transistors.
7. The light emitting device according to claim 1 , the light emitting device further comprising:
a plurality of pixels, each of the plurality of pixels including at least two transistors, the at least two transistors including the drive transistor, and
wherein the element isolation portion isolates one of the at least two transistors of a first pixel among the plurality of pixels from one of the at least two transistors of a second pixel adjacent to the first pixel.
8. The light emitting device according to claim 7 ,
wherein, in the element isolation portion, a width of a portion that isolates the one of the at least two transistors of the first pixel from the one of the at least two transistors of the second pixel is greater than the channel width of one transistor among the plurality of transistors.
9. The light emitting device according to claim 1 ,
wherein the element isolation portion has a structure in which an insulator fills a groove portion formed on the semiconductor substrate.
10. A light emitting device comprising:
a semiconductor substrate including an n-type well that is disposed on the surface of a p-type substrate;
a plurality of transistors formed on the semiconductor substrate;
a light emitting element;
a groove portion formed in a partially removed region of the n-type well on the semiconductor substrate; and
an insulator that fills inside of the groove portion,
the plurality of transistors including a drive transistor that controls a drive current flowing in the light emitting element according to a potential of a gate, and
the insulator being disposed between one transistor and another transistor among the plurality of transistors.
11. An electronic apparatus comprising;
the light emitting device according to claim 1 .
12. An electronic apparatus comprising;
the light emitting device according to claim 2 .
13. An electronic apparatus comprising;
the light emitting device according to claim 3 .
14. An electronic apparatus comprising;
the light emitting device according to claim 4 .
15. An electronic apparatus comprising;
the light emitting device according to claim 5 .
16. An electronic apparatus comprising;
the light emitting device according to claim 6 .
17. An electronic apparatus comprising;
the light emitting device according to claim 7 .
18. An electronic apparatus comprising;
the light emitting device according to claim 8 .
19. An electronic apparatus comprising;
the light emitting device according to claim 9 .
20. An electronic apparatus comprising;
the light emitting device according to claim 10 .
21. A light emitting device comprising:
a semiconductor substrate including an n-type well that is disposed on the surface of a p-type substrate;
a plurality of transistors including a drive transistor which controls a drive current according to a potential of a gate, the plurality of transistors being formed on the semiconductor substrate;
a light emitting element that emits a light having a brightness corresponding to the drive current; and
an element isolation portion that isolates one transistor from another transistor among the plurality of transistors, the element isolation portion having a groove portion formed in a partially remove region of the n-type well on the semiconductor substrate that is deeper in a thickness direction of the semiconductor substrate than a thickness of (i) a diffusion layer of the one transistor or (ii) a diffusion layer of the another transistor.