Methods of manufacturing abrasive particle and polishing slurry
Provided is a method of manufacturing an abrasive particle including a mother particle and a plurality of auxiliary particles formed on a surface of the mother particle, and a method of manufacturing a polishing slurry in which the abrasive particle is mixed with a polishing accelerating agent and a pH adjusting agent.
1. A method of manufacturing an abrasive particle, comprising:
mixing a first precursor material aqueous solution and a diluted alkaline solution and thermally treating the mixture solution to prepare a mother particle having a polyhedral crystal face; and
adding an alkaline solution to a mixture solution in which the mother particle is mixed, mixing a second precursor material aqueous solution and thermally treating the resultant mixture solution to form a plurality of auxiliary particles protruded outward from a surface of the mother particle.
2. The method of claim 1 , wherein the plurality of auxiliary particles are formed so as to cover a portion of each of crystal faces centered on an edge portion where at least three crystal faces among the polyhedral crystal faces meet.
3. The method of claim 1 , wherein the preparing of the mother particle comprises:
mixing a precursor material with deionized water to prepare the first precursor material aqueous solution;
preparing a diluted alkaline solution and loading and stirring the prepared alkaline solution in a reaction container;
mixing the first precursor material aqueous solution in the reaction container and thermal treating the resultant mixture solution; and
cooling the thermally treated mixture solution.
4. The method of claim 3 , further comprising mixing an acidic solution to the first precursor material aqueous solution.
5. The method of claim 3 , wherein the thermally treating is conducted at a temperature higher than 60° C. and not higher than 100° C. for approximately 2 hours to approximately 24 hours.
6. The method of claim 5 , wherein the thermally treating temperature rises at a rate of approximately 0.2° C./min to approximately 1° C./min.
7. The method of claim 1 , wherein the forming of the auxiliary particles comprises:
adding and stirring an alkaline solution in a mixture solution in which the mother particle is mixed;
mixing the second precursor material aqueous solution prepared by mixing a precursor material with deionized water in the mixture solution in which the mother particle is mixed;
thermally treating the mixture solution; and
cooling the thermally treated mixture solution.
8. The method of claim 7 , wherein the thermally treating is conducted at a temperature higher than 60° C. and not higher than 100° C. for approximately 2 hours to approximately 24 hours.
9. The method of claim 8 , wherein the thermally treating temperature rises at a rate of approximately 0.2° C./min to approximately 1° C./min.
10. The method of claim 2 , further comprising repeating the adjusting of the size of the auxiliary particles at least one time.
11. The method of claim 10 , wherein the adjusting of the size of the auxiliary particles comprises:
adding and stirring an alkaline solution in a mixture solution in which an abrasive particle including the mother particle and the auxiliary particles formed on the surface of the mother particle is mixed;
mixing a third precursor material aqueous solution prepared by mixing a precursor material with deionized water in the mixture solution in which the abrasive particle is mixed;
thermally treating the mixture solution; and
cooling the thermally treated mixture solution.
12. The method of claim 11 , wherein the thermally treating is conducted at a temperature higher than 60° C. and not higher than 100° C. for approximately 2 hours to approximately 24 hours.
13. The method of claim 12 , wherein the thermally treating temperature rises at a rate of approximately 0.2° C./min to approximately 1° C./min.
14. The method of any of claim 1 , wherein the auxiliary particles adjacent to each other are spaced apart from each other or contact each other.
15. The method of claim 14 , wherein the plurality of auxiliary particles contacting each other have an overlapping height ranging from approximately 0% to approximately 70% to a maximum height thereof.
16. The method of claim 14 , wherein each of the mother particle and the auxiliary particles comprises a ceria particle.
17. The method of claim 1 , wherein the auxiliary particle to the mother particle is formed at a size ratio of approximately 100:1 to approximately 5:1.
18. The method of claim 17 , wherein the abrasive particle is formed to have an average particle diameter ranging from approximately 6 nm to approximately 350 nm.
19. The method of claim 18 , wherein the mother particle has an average particle diameter of approximately 5 nm to approximately 300 nm and the auxiliary particle has an average particle diameter of approximately 1 nm to approximately 50 nm.