Semiconductor device, resistor and manufacturing method of the same

1. A method for manufacturing a semiconductor device, the method comprising:

forming a first conductive layer including a first trench;

forming a sacrificial layer in the first trench;

forming a second conductive layer on the first conductive layer where the sacrificial layer is formed;

forming a second trench exposing the sacrificial layer by patterning the first and second conductive layers, wherein the first conductive layer is patterned into a plate shape and the second conductive layer is patterned into a plurality of lines;

removing the sacrificial layer through the second trench; and

forming an insulating layer in the first and second trenches,

wherein during the forming of the first conductive layer, another conductive layer for a pipe gate made of a same material as the first conductive layer is formed in a cell region, wherein the conductive layer for the pipe gate includes a third trench, and

wherein during the forming of the second trench, a fourth trench is formed in the conductive layer for the pipe gate to pattern the conductive layer into pipe gates in the cell region.

2. The method according to claim 1 ,

wherein the first conductive layer is located in a resistor region.

3. The method according to claim 1 ,

further comprising:

forming a plurality of contact plugs electrically coupled to the plurality of lines.

4. The method according to claim 1 ,

wherein the forming the second trench uses the sacrificial layer as an etching barrier.

5. The method according to claim 1 ,

wherein during the forming of an insulating layer, forming an isolation layer made of a same material as the insulating layer in the fourth trench.