Method of automatically measuring seed melt back of crystalline material
View Patent ↗A method and apparatus for measuring a melt back of a seed in a boule are provided. The method includes lifting a boule once it has been produced using an actuating device onto a support table to automatically manipulate the boule from a furnace to the support table. The melt back of the seed is then automatically measured using a vision system that is installed on an imaging device disposed below the boule.
1. A method of measuring a melt back of a seed within a boule, the method comprising:
lifting, by an actuating device, the boule out of a crucible in a furnace and onto a support table located outside of the furnace, wherein the actuating device is capable of lifting a boule that weighs up to about 650 lbs; and
automatically measuring, by a vision system, the melt back of the seed within the boule by measuring a diameter of the seed after the boule is formed, wherein the vision system is installed on an imaging device disposed below a bottom of the boule and the support table.
2. The method of claim 1 , further comprising:
transmitting the melt back measurement of the seed to a controller to adjust a temperature setting of the furnace.
3. The method of claim 1 , further comprising:
determining whether the measured melt back is a predetermined diameter.
4. The method of claim 3 , wherein the predetermined diameter is a range from about 2.0 to about 3.0 inches.
5. The method of claim 4 , wherein the seed is about 3.3 inches in diameter and the predetermined diameter is about 2.6 inches.
6. The method of claim 3 , further comprising:
in response to determining that the measured melt back is the predetermined diameter, cutting the boule into a plurality of wafers.
7. The method of claim 1 , further comprising:
determining whether the boule has a determined crystallographic structure based on the measured seed melt back.
8. The method of claim 7 , further comprising:
determining whether the boule has a monocrystalline structure based on the measured seed melt back.
9. The method of claim 1 , wherein the boule is a silicon boule.
10. The method of claim 1 , wherein the boule is a sapphire crystal boule.
11. The method of claim 1 , wherein the actuating device is a pair of automated lifting tongs.
12. An apparatus that measures a melt back of a seed within a boule, the apparatus comprising:
a support table located outside of a furnace;
an actuating device that lifts and automatically manipulates the boule out of a crucible in the furnace onto the support table, wherein the actuating device is capable of lifting a boule that weighs up to about 650 lbs; and
a vision system that automatically measures the melt back of the seed within the boule by measuring a diameter of the seed after the boule is formed, wherein the vision system is installed on an imaging device disposed below the boule and the support table.
13. The apparatus of claim 12 , further comprising a controller configured to:
determine whether the measured melt back is a predetermined diameter.
14. The apparatus of claim 13 , wherein the predetermined diameter is a range from about 2.0 to about 3.0 inches.
15. The apparatus of claim 13 , wherein the seed is about 3.3 inches in diameter and the predetermined diameter is about 2.6 inches.
16. The apparatus of claim 13 , wherein the controller is further configured to:
determine whether the boule has a determined crystallographic structure based on the measured seed melt back.
17. The apparatus of claim 12 , wherein the boule is produced in the furnace.
18. The apparatus of claim 12 , wherein the boule is a sapphire boule.
19. The apparatus of claim 12 , wherein actuating device is a pair of automated lifting tongs.