Solar cell and fabrication method thereof
View Patent ↗A fabrication method of a solar cell, the method includes doping a silicon substrate having a first conductive type impurity with a second conductive type impurity, the second conductive type impurity being opposite to the first conductive type impurity, and thereby forming an emitter layer at a front surface part of the silicon substrate, forming an antireflection film on the emitter layer, forming a front electrode on the antireflection film, forming a rear electrode on a rear surface of the silicon substrate, and forming a back surface field layer at a rear surface part of the silicon substrate, the back surface field layer having a concentration of the first conductive type impurity that is higher than that of the silicon substrate, the back surface field layer having a different concentration of the second conductive type impurity from that of the emitter layer.
1. A fabrication method of a solar cell, the method comprising:
doping a silicon substrate having a first conductive type impurity with a second conductive type impurity, the second conductive type impurity being opposite to the first conductive type impurity, and thereby forming an emitter layer at a front surface part of the silicon substrate;
forming an antireflection film on the emitter layer;
forming a front electrode on the antireflection film;
forming a rear electrode on a rear surface of the silicon substrate; and
forming a back surface field layer at a rear surface part of the silicon substrate, the back surface field layer having a concentration of the first conductive type impurity that is higher than that of the silicon substrate, the back surface field layer having a different concentration of the second conductive type impurity from that of the emitter layer,
wherein the forming of the back surface field layer includes removing at least a portion of a second conductive type impurity doping layer formed at the rear surface part of the silicon substrate.
2. The fabrication method of a solar cell according to claim 1 , wherein the back surface field layer does not include the second conductive type impurity.
3. The fabrication method of a solar cell according to claim 1 , wherein the first conductive type impurity of the back surface field layer is aluminum (Al).
4. The fabrication method of a solar cell according to claim 1 , wherein the forming of the front electrode comprises coating a front electrode paste to a front surface of the silicon substrate and annealing the front electrode paste to connect to the emitter layer and form the front electrode.
5. The fabrication method of a solar cell according to claim 1 , wherein the forming of the rear electrode comprises coating a rear electrode paste to the rear surface of the silicon substrate and annealing the rear electrode paste to form the rear electrode and the back surface field layer.
6. The fabrication method of a solar cell according to claim 1 , wherein the forming of the front electrode and the rear electrode comprises coating a front electrode paste and a rear electrode paste, and annealing the front electrode paste and the rear electrode paste in temperatures from 600 to 750° C. at the same time.
7. The fabrication method of a solar cell according to claim 1 , further comprising texturing the silicon substrate to form an unevenness on a front surface or on the front surface and the rear surface of the silicon substrate.
8. The fabrication method of a solar cell according to claim 7 , wherein, when the unevenness is formed on the front surface and the rear surface, the forming of the back surface field layer includes reducing or removing the unevenness formed on the rear surface of the silicon substrate.
9. The fabrication method of a solar cell according to claim 1 , wherein the removing of the at least a portion of the second conductive type impurity doping layer comprises removing the second conductive type impurity doping layer and a portion of the silicon substrate at the rear surface part of the first conductive type silicon substrate.
10. The fabrication method of a solar cell according to claim 1 , wherein the forming of the emitter layer includes forming a first region where the second conductive type impurity has a first concentration and a second region where the second conductive type impurity has a concentration higher than the first concentration, and
wherein the first region of the emitter layer is thinner than the second region of the emitter layer.
11. The fabrication method of a solar cell according to claim 10 , wherein the forming of the emitter layer further includes forming a mask layer on a front surface of the silicon substrate and forming a predetermined opening part in the mask layer;
forming the second region through the predetermined opening part; and
forming the first region after removing the mask layer.
12. The fabrication method of a solar cell according to claim 11 , wherein the forming of the mask layer deposits a silicon oxide layer on the silicon substrate.
13. The fabrication method of a solar cell according to claim 12 , wherein the deposition of the silicon oxide layer is performed using at least one of an atmosphere pressure chemical vapor deposition (APCVD) method, a low pressure chemical vapor deposition (LPCVD) method, a plasma enhanced chemical vapor deposition (PECVD) method, a sputtering method, and an electronic beam deposition method.
14. The fabrication method of a solar cell according to claim 11 , wherein the forming of the predetermined opening part in the mask layer includes coating an etching paste on a predetermined region of the mask layer and etching the etching paste.
15. The fabrication method of a solar cell according to claim 11 , wherein the forming of the predetermined opening part in the mask layer is performed by at least one of a photolithography method, an optical scribing method, a mechanical scribing method, a plasma etching method, a wet etching method, a dry etching method, a lift-off method, and a wire mask method.
16. The fabrication method of a solar cell according to claim 11 , wherein the forming of the second region and the first region comprises thermally diffusing different impurity doping concentrations of the second conductive type impurity in temperatures from 800 to 950° C. for 20 to 100 minutes.
17. The fabrication method of a solar cell according to claim 11 , wherein the forming of the second region includes thermally diffusing the second conductive type impurity at a higher temperature and for a longer time than when forming the first region.
18. The fabrication method of a solar cell according to claim 1 , wherein the removing of the at least a portion of the second conductive type impurity doping layer formed on the rear surface part of the silicon substrate is performed using at least one of an optical scribing method, a mechanical scribing method, a plasma etching method, a wet etching method, a dry etching method, a lift-off method, and a wire mask method.
19. The fabrication method of a solar cell according to claim 1 , wherein removing of the at least a portion of a second conductive type impurity doping layer obtains a thickness of the first conductive type silicon substrate that is 100 μm to 150 μm.