Solar cell fabricated by simplified deposition process
View Patent ↗Methods of fabricating solar cells using simplified deposition processes, and the resulting solar cells, are described. In an example, a method of fabricating a solar cell involves loading a template substrate into a deposition chamber and, without removing the template substrate from the deposition chamber, performing a deposition method. The deposition method involves forming a first silicon layer on the template substrate, the first silicon layer of a first conductivity type. The deposition method also involves forming a second silicon layer on the first silicon layer, the second silicon layer of the first conductivity type. The deposition method also involves forming a third silicon layer above the second silicon layer, the third silicon layer of a second conductivity type. The deposition method also involves forming a solid state doping layer on the third silicon layer, the solid state doping layer of the first conductivity type.
1. A solar cell, comprising:
a monocrystalline silicon semiconductor substrate having a light-receiving surface and a back surface;
a dielectric layer disposed directly on the back surface of the substrate;
a monocrystalline silicon layer disposed directly on the dielectric layer, wherein the dielectric layer is between the substrate and the monocrystalline silicon layer;
wherein the monocrystalline silicon layer comprises a first monocrystalline silicon emitter region doped with an impurity of a first conductivity type and a second monocrystalline silicon emitter region doped with an impurity of a second, opposite conductivity type, wherein the first monocrystalline silicon emitter region and the second monocrystalline silicon emitter region are in direct contact with the dielectric layer; and
wherein the first monocrystalline silicon emitter region is in direct contact with the second monocrystalline silicon emitter region forming a P/N junction between the first monocrystalline silicon emitter region and the second monocrystalline silicon emitter region.
2. The solar cell of claim 1 , wherein the first monocrystalline silicon emitter region further comprises the impurity of the second conductivity type.
3. The solar cell of claim 2 , wherein the total concentration of the impurity of the first conductivity type in the first monocrystalline silicon emitter region is greater than the total concentration of the impurity of the second conductivity type in the first and second monocrystalline silicon emitter regions by at least one order of magnitude.
4. The solar cell of claim 1 , further comprising:
a first conductive contact structure electrically connected to the first monocrystalline silicon emitter region; and
a second conductive contact structure electrically connected to the second monocrystalline silicon emitter region.
5. The solar cell of claim 1 , wherein the dielectric layer comprises gadolinium oxide.