Vibrator, oscillator, electronic device, and moving object
A MEMS vibrator includes: a substrate; a base portion which is disposed on the substrate; and a plurality of vibration portions which extend in directions different from each other from the base portion. The MEMS vibrator has a curved surface between the adjacent vibration portions.
1. A vibrator, comprising:
a substrate;
a base portion which is disposed on the substrate;
a plurality of vibration portions which extend in directions different from each other from the base portion; and
a plurality of lower electrodes disposed on a surface of the substrate opposite the vibration portions and overlapped with the plurality of vibration portions and base portion in a plan view,
wherein the lower electrodes excite the vibration portions, and
wherein a curved surface is provided between the adjacent vibration portions.
2. The vibrator according to claim 1 , further comprising
a supporting portion connecting the substrate and the base portion and being connected to a surface of a side facing the substrate of the base portion.
3. The vibrator according to claim 2 ,
wherein there are plural supporting portions.
4. An oscillator, comprising:
the vibrator according to claim 1 .
5. An electronic device, comprising:
the vibrator according to claim 1 .
6. A moving object, comprising:
the vibrator according to claim 1 .