Semiconductor device and method for fabricating semiconductor device
View Patent ↗A semiconductor device includes a first electrode layer and a second electrode layer disposed over a substrate, a first insulating layer disposed over the first electrode layer, and a reflective electrode layer disposed on the first insulating layer and electrically connected to the first electrode layer, wherein the second electrode layer is exposed externally, and a thickness of the second electrode layer is greater than a thickness of the reflective electrode layer.
1. A semiconductor device fabrication method comprising:
forming a first electrode layer and a second electrode layer over a substrate;
forming a first insulating layer on the first electrode layer and second electrode layer;
forming a reflective electrode layer, that is electrically connected to the first electrode layer, on the first insulating layer;
forming a second insulating layer on the reflective electrode layer and a portion of the first insulating layer above the second electrode layer;
exposing the second electrode layer by etching the second insulating layer and the first insulating layer located above the second electrode layer with the second insulating layer left on the reflective electrode layer; and
after exposing the second electrode layer, exposing the reflective electrode layer by etching the second insulating layer located on the reflective electrode layer.
2. A semiconductor device fabrication method comprising:
forming a first electrode layer and a second electrode layer over a substrate;
forming a first insulating layer on the first electrode layer and second electrode layer;
forming a reflective electrode layer, that is electrically connected to the first electrode layer, on the first insulating layer;
forming a second insulating layer on the reflective electrode layer and a portion of the first insulating layer above the second electrode layer;
etching the second insulating layer and a portion of the first insulating layer located above the second electrode layer in a depth direction, with the second insulating layer left on the reflective electrode layer; and
after etching the portion of the first insulating layer, exposing the second electrode layer by etching the first insulating layer left on the second electrode layer, and exposing the reflective electrode layer by etching the second insulating layer located on the reflective electrode layer.
3. The semiconductor device fabrication method according to claim 2 , wherein after etching the second insulating layer and the portion of the first insulating layer, a thickness of the first insulating layer remaining on the second electrode layer is equal to or less than a thickness of the second insulating layer left on the reflective electrode layer.
4. The semiconductor device fabrication method according claim 2 , wherein in exposing the second electrode layer, and exposing the reflective electrode layer, the second insulating layer is etched at a rate equal to or slower than a rate at which the first insulating layer is etched.
5. The semiconductor device fabrication method according to claim 1 , wherein the second electrode layer is arranged outside of the first electrode layer in planar view.
6. The semiconductor device fabrication method according to claim 2 , wherein the second electrode layer is arranged outside of the first electrode layer in planar view.