IP Library Granted Patent US 9,496,452
Granted Patent B2
US 9,496,452 · App. 14/517,959 · Granted Nov 15, 2016

Method of absorber surface repairing by solution process

Inventor: Shih-Wei Chen (Kaohsiung, TW)
Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
H01L31/186H01L21/02557H01L21/02628H01L31/0322H01L31/0749
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Quick Facts
Patent No.
US 9,496,452
App. No.
14/517,959
Granted
Nov 15, 2016
Kind
B2
Abstract

Methods and systems for repairing oxidation of CIGS surfaces during manufacture of a CIGS solar cell are generally disclosed. Oxidation of an absorber reduces the photoluminescence intensity of the CIGS surface. The absorber is immersed in a reduction tank having a reducing reagent therein. The reducing reagent reverses the oxidation of the CIGS absorber, increasing the interface quality and corresponding photoluminescence intensity. After reversing the oxidation, a buffer layer is deposited on the CIGS absorber to prevent further surface oxidation.

Claims (31)

1. A method for manufacturing a photovoltaic device comprising the steps of:

forming an absorber layer above a substrate;

immersing the absorber layer in a reduction reagent, wherein the reduction reagent is configured to react with a surface structure of the absorber layer to desorb oxygen therefrom; and

forming a buffer layer on the absorber layer.

2. The method of claim 1 , wherein the absorber layer comprises a copper/iridium/gallium/selenium (CIGS) absorber layer.

3. The method of claim 2 , further comprising the steps of:

adjusting one or more parameters of the reduction reagent, wherein the one or more parameters of the reduction reagent are adjusted prior to immersing the absorber layer in the reduction reagent, and wherein the one or more parameters are adjusted for a predetermined immersion period.

4. The method of claim 3 , wherein the one or more parameters comprise at least one of a temperature, a concentration, an immersion time, a pH value, or any combination thereof.

5. The method of claim 4 , wherein the temperature is selected within a range of 25° C. to 90° C., the concentration is selected within a range of 0.05M to 5M, the immersion time is selected within a range of 1 minute to 30 minutes, and the pH value is selected within a range of 1 to 7.

6. The method of claim 5 , wherein the pH value is selected within a range of 2 to 3.

7. The method of claim 1 , wherein the reduction reagent is selected from the group consisting of: sodium sulfite, sodium dithionite, sodium metabisulfite, sodium phosphinate, and thiourea.

8. The method of claim 1 , wherein the absorber layer is formed in a vacuum.

9. The method of claim 1 , wherein desorb of oxygen from the surface structure of the absorber layer increases photoluminescence of the absorber layer.

10. A method of treating an absorber, comprising the steps of:

providing a reduction reagent tank comprising a reduction reagent; and

immersing a substrate having a previously oxidized absorber in the reduction reagent for a predetermined time period, wherein the reduction reagent is configured to react with a surface of the previously oxidized absorber to desorb oxygen therefrom.

11. The method of claim 10 , further comprising selecting the predetermined time period based on one or more parameters of the reduction reagent.

12. The method of claim 11 , wherein the one or more parameters of the reduction reagent comprises a predetermined temperature.

13. The method of claim 11 , wherein the one or more parameters of the reduction reagent comprises a predetermined pH value.

14. The method of claim 10 , wherein reduction reagent comprises a predetermined pH value of less than or equal to a pH of 3.

15. The method of claim 10 , wherein the reduction agent is selected from the group consisting essentially of sodium sulfite, sodium dithionite, sodium metabisulfite, sodium phosphinate, and Thiourea.

16. The method of claim 10 , wherein the predetermined time period is selected such that the oxidized absorber is restored to a photoluminescence substantially equal to a photoluminescence of an absorber that has not been oxidized.

17. The method of claim 10 , further comprising the steps of:

removing the absorber from the reduction tank; and

drying the absorber in a heater.

18. The method of claim 17 , further comprising the step of applying a buffer layer to the absorber.

19. A method for manufacturing a photovoltaic device comprising the steps of:

forming an absorber layer above a substrate;

exposing the absorber layer to air, so as to oxidize a surface of the absorber layer;

immersing the absorber layer in a reduction reagent that reacts with the oxidized surface of the absorber layer to desorb oxygen therefrom; and

forming a buffer layer on the absorber layer.

Assignments (2)
MERGER Recorded Jun 16, 2016
From: TSMC SOLAR LTD.
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 039050/0299 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 20, 2014
From: CHEN, SHIH-WEI
To: TSMC SOLAR LTD.
Reel/Frame 033978/0287 →
Continuity (1)
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