Semiconductor device including a MOSFET

1. A semiconductor device including a MOSFET, comprising:

a semiconductor substrate having a main surface and a back surface opposite to the main surface;

a well region in which a channel of the MOSFET is formed, in the semiconductor substrate;

a gate insulating film of the MOSFET;

a gate electrode of the MOSFET disposed over the gate insulating film;

a source region of the MOSFET disposed in the well region;

a source electrode of the MOSFET disposed over the main surface of the semiconductor substrate and coupled to the source region;

a drain electrode of the MOSFET disposed over the back surface of the semiconductor substrate and coupled to the semiconductor substrate;

a Schottky barrier diode that is adjacent to the MOSFET, the Schottky barrier diode comprising a part of the source electrode and a part of the main surface of the semiconductor substrate; and

a semiconductor region having a conductivity type opposite to that of the semiconductor substrate and being formed in the semiconductor substrate adjacent to said part of the main surface of the semiconductor substrate,

wherein the semiconductor region and said part of the source electrode comprising the Schottky barrier diode overlap in plan view,

wherein the source electrode is comprised of aluminum, and

wherein the source electrode and the source region are coupled via a titanium-tungsten film.

2. The semiconductor device according to claim 1 ,

wherein a trench is disposed in the semiconductor substrate at the main surface,

wherein the gate insulating film is disposed in the trench, and

wherein the gate electrode is disposed over the gate insulating film in the trench.

3. The semiconductor device according to claim 2 ,

wherein the semiconductor substrate and the source region have a first conductivity type, and

wherein the well region and the semiconductor region have a second conductivity type that is opposite to the first conductivity type.

4. The semiconductor device according to claim 3 ,

wherein the first and second conductivity types are n-type and p-type, respectively.

5. The semiconductor device according to claim 4 ,

wherein the semiconductor substrate includes phosphorous.

6. The semiconductor device according to claim 1 ,

wherein the semiconductor substrate comprises a first semiconductor layer and a second semiconductor layer disposed over the first semiconductor layer,

wherein an impurity concentration of the first semiconductor layer is higher than that of the second semiconductor layer, and

the Schottky barrier diode comprises said part of the source electrode and a part of a surface of the second semiconductor layer that forms said part of the main surface of the semiconductor substrate.

7. A semiconductor device including a MOSFET, comprising:

a semiconductor substrate having a main surface and a back surface opposite to the main surface;

a plurality of transistor cell regions disposed in the semiconductor substrate, each of the plurality of transistor cell regions including:

a plurality of trenches disposed in the semiconductor substrate at the main surface;

a well region, in which a channel of the MOSFET is formed, disposed between the plurality of trenches;

a gate insulating film of the MOSFET disposed in each of the plurality of trenches;

a gate electrode of the MOSFET disposed over the gate insulating film in each of the plurality of trenches; and

a source region of the MOSFET disposed in the well region;

a source electrode of the MOSFET disposed over the main surface of the semiconductor substrate and coupled to the source region in each of the plurality of transistor cell regions;

a drain electrode of the MOSFET disposed over the back surface of the semiconductor substrate and electrically connected to the semiconductor substrate;

a Schottky cell region disposed between the plurality of transistor cell regions in the semiconductor substrate; and

a semiconductor region having a conductivity type opposite to that of the semiconductor substrate,

wherein a part of the source electrode is in contact with a part of the main surface of the semiconductor substrate so as to form a Schottky junction in the Schottky cell region,

wherein the semiconductor region is formed in the semiconductor substrate adjacent to said part of the main surface of the semiconductor substrate,

wherein the semiconductor region and said part of the source electrode overlap in plan view,

wherein the source electrode is comprised of aluminum, and

wherein the source electrode and the source region are coupled via a titanium-tungsten film.

8. The semiconductor device according to claim 7 ,

wherein the semiconductor substrate and the source region have a first conductivity type, and

the well region and the semiconductor region have a second conductivity type which is opposite to the first conductivity type.

9. The semiconductor device according to claim 8 ,

wherein the first and second conductivity types are n-type and p-type, respectively.

10. The semiconductor device according to claim 9 ,

wherein the semiconductor substrate includes phosphorous.

11. The semiconductor device according to claim 7 ,

wherein a plurality of field insulating films are disposed on the main surface of the semiconductor substrate in the Schottky cell region,

the source electrode is partially located over the field insulating films, and

the Schottky junction is formed between the plurality of field insulating films.

12. A semiconductor device including a MOSFET, comprising:

a semiconductor substrate having a main surface and a back surface opposite to the main surface;

a well region in the semiconductor substrate and in which a channel of the MOSFET is formed;

a gate insulating film of the MOSFET;

a gate electrode of the MOSFET disposed over the gate insulating film;

a source region of the MOSFET disposed in the well region;

a drain electrode of the MOSFET disposed over and coupled to the back surface of the semiconductor substrate;

a source electrode of the MOSFET disposed over the main surface of the semiconductor substrate and having a first part coupled to the source region and a second part in contact with a part of the main surface of the semiconductor substrate;

a Schottky barrier diode adjacent to the MOSFET and comprising said second part of the source electrode and the contacted part of the main surface of the semiconductor substrate; and

a semiconductor region having a conductivity type opposite to that of the semiconductor substrate and being formed in the semiconductor substrate between said contacted part of the main surface of the semiconductor substrate and the source region,

wherein the second part of the source electrode extends over at least a portion of the semiconductor region in plan view,

wherein the source electrode is comprised of aluminum, and

wherein the source electrode and the source region are coupled via a titanium-tungsten film.

13. The semiconductor device according to claim 12 , wherein:

a trench is disposed in the semiconductor substrate at the main surface,

the gate insulating film is disposed in the trench, and

the gate electrode is disposed over the gate insulating film in the trench.

14. The semiconductor device according to claim 12 , wherein the semiconductor substrate and the source region have a first conductivity type, and the well region and the semiconductor region have a second conductivity type opposite to the first conductivity type.

15. A semiconductor device according to claim 14 ,

wherein the first and second conductivity types are n-type and p-type, respectively.

16. The semiconductor device according to claim 15 , wherein the semiconductor substrate includes phosphorous.

17. The semiconductor device according to claim 12 , wherein:

the semiconductor substrate comprises a first semiconductor layer and a second semiconductor layer disposed over the first semiconductor layer,

an impurity concentration of the first semiconductor layer is higher than that of the second semiconductor layer, and

the Schottky barrier diode comprises said second part of the source electrode and a part of a surface of the second semiconductor layer that forms said contacted part of the main surface of the semiconductor substrate.

18. The semiconductor device according to claim 12 , further comprising:

a plurality of field insulating films disposed on the main surface of the semiconductor substrate,

wherein the Schottky junction is formed between the plurality of field insulating films.

19. The semiconductor device according to claim 12 , wherein the second part of the source electrode is in contact with a surface of the semiconductor region.