Magnetic detection device
View Patent ↗A magnetic field component in a Z direction is guided by a magnetic field guide layer and applied to a magnetic sensor in an X direction that is the same as a sensitivity axis direction thereof, and a detection output is obtained. A bridge circuit is formed with a plurality of magnetic sensors and configured such that an output is not provided for a magnetic field component in the X direction. However, when an external magnetic field in the X direction is drawn to the magnetic field guide layer, variation of sensitivity for the X direction may occur. Thus, soft magnetic characteristics of a first portion of the magnetic field guide layer are deteriorated to decrease the magnetic permeability of the first portion.
1. A magnetic detection device comprising:
a magnetic field guide structure configured to guide a magnetic field component in a first direction; and
a magnetic sensor disposed on a virtual surface facing the magnetic field guide structure, the magnetic sensor having a sensitivity axis in a second direction perpendicular to the first direction, wherein
the magnetic field guide structure includes an end of a first portion facing the magnetic sensor, a second portion away from the magnetic sensor, and a third portion more away from the magnetic sensor than the second portion; and
wherein:
a magnetic permeability of the third portion is lower than that of the second portion,
a magnetic permeability of the first portion is lower than that of the second portion, and
a coercive force of the second portion is lower than that of the third portion.
2. The magnetic detection device according to claim 1 , wherein a coercive force of the second portion is lower than that of the first portion.
3. The magnetic detection device according to claim 1 , wherein
the magnetic field guide structure comprises an alloy containing iron, and
an iron content of the first portion is lower than that of the second portion.
4. A magnetic detection device comprising:
a magnetic field guide structure configured to guide a magnetic field component in a first direction; and
a magnetic sensor disposed on a virtual surface facing the magnetic field guide structure, the magnetic sensor having a sensitivity axis in a second direction perpendicular to the first direction,
wherein:
the magnetic field guide structure includes an end of a first portion facing the magnetic sensor, a second portion away from the magnetic sensor, and a third portion more away from the magnetic sensor than the second portion;
a magnetic permeability of the third portion is lower than that of the second portion
a magnetic permeability of the first portion is lower than that of the second portion,
the magnetic field guide structure comprises an alloy containing iron, and
an iron content of the third portion is lower than that of the second portion.
5. The magnetic detection device according to claim 1 , wherein an iron content of the first portion is not lower than 11 mass % and not higher than 14 mass %.
6. The magnetic detection device according to claim 1 , wherein a dimension of the first portion of the magnetic field guide structure in the first direction is not higher than 45% of a dimension of the magnetic field guide structure in the first direction.
7. The magnetic detection device according to claim 1 , wherein
the magnetic sensor includes a magnetoresistance effect element in which a fixed magnetic layer and a free magnetic layer are laminated via a non-magnetic layer, and fixed magnetization of the fixed magnetic layer is directed in the second direction.
8. The magnetic detection device according to claim 1 , wherein the magnetic field guide structure is offset to only one side of the magnetic sensor.
9. The magnetic detection device according to claim 4 , wherein a coercive force of the second portion is lower than that of the first portion.
10. The magnetic detection device according to claim 4 , wherein the magnetic field guide structure comprises an alloy containing iron, and an iron content of the first portion is lower than that of the second portion.
11. The magnetic detection device according to claim 4 , wherein an iron content of the first portion is not lower than 11 mass % and not higher than 14 mass %.
12. The magnetic detection device according to claim 4 , wherein a dimension of the first portion of the magnetic field guide structure in the first direction is not higher than 45% of a dimension of the magnetic field guide structure in the first direction.
13. The magnetic detection device according to claim 4 , wherein
the magnetic sensor includes a magnetoresistance effect element in which a fixed magnetic layer and a free magnetic layer are laminated via a non-magnetic layer, and fixed magnetization of the fixed magnetic layer is directed in the second direction.
14. The magnetic detection device according to claim 4 , wherein the magnetic field guide structure is offset to only one side of the magnetic sensor.
15. The magnetic detection device according to claim 4 , wherein a coercive force of the second portion is lower than that of the third portion.