MEMS pressure sensor with improved insensitivity to thermo-mechanical stress
View Patent ↗This invention relates generally to semiconductor manufacturing and packaging and more specifically to semiconductor manufacturing in MEMS (Microelectromechanical systems) inertial sensing products. Embodiments of the present invention improve pressure sensor performance (e.g., absolute and relative accuracy) by increasing pressure insensitivity to changes in thermo-mechanical stress. The pressure insensitivity can be achieved by using the array of pressure sensing membranes, suspended sensing electrodes, and dielectric anchors.
1. A system for providing thermo-mechanical insensitivity, comprising:
a sealed cavity;
an array of membranes acting as pressure sensors within the sealed cavity;
a plurality of sensing electrodes, wherein the sensing electrodes are suspended within the sealed cavity; and
dielectric anchors coupled to the sensing electrodes and the sensing membranes.
2. The system of claim 1 , wherein the dielectric anchors are made of silicon dioxide.
3. The system of claim 1 , wherein the dielectric anchors are made of silicon nitride.
4. The system of claim 1 , wherein the sensing electrodes are made of poly crystalline silicone.
5. The system of claim 1 , wherein the sensing electrodes are made of mono crystalline silicon.
6. The system of claim 1 , wherein the sensing electrodes are made of aluminum.
7. The system of claim 1 , wherein the suspension is achieved using a membrane with a plurality of pillars that act as anchors to the sensing electrode.
8. The system of claim 1 , wherein the array of pressure sensors is comprised of twenty five membranes.
9. The system of claim 1 , wherein the system is integrated in a single die with inertial sensors.
10. A system for providing thermo-mechanical insensitivity, comprising:
a cap wafer;
a structural layer;
an array of pressure sensing electrodes;
a plurality of suspended sensing electrodes;
a plurality of dielectric anchors used to suspend the suspended sensing electrodes; and
decoupling trenches to provide decoupling between a substrate and the suspended sensing electrodes.
11. The system of claim 10 , wherein the suspended sensing electrode is realized using the structural layer of the sensing electrodes.
12. The system of claim 10 , wherein the dielectric anchors are realized using a residual of sacrificial oxide removed to release the structural layer.