Dielectric nanocomposites and methods of making the same
View Patent ↗Techniques related to nanocomposite dielectric materials are generally described herein. These techniques may be embodied in apparatuses, systems, methods and/or processes for making and using such material. An example process may include: providing a film having a plurality of nanoparticles and an organic medium; comminuting the film to form a particulate; and applying the particulate to a substrate. The example process may also include providing a nanoparticle film having nanoparticles and voids located between the nanoparticles; contacting the film with a vapor containing an organic material; and curing the organic material to form the nanocomposite dielectric film. Various described techniques may provide nanocomposite dielectric materials with superior nanoparticle dispersion which may result in improved dielectric properties.
1. A nanocomposite dielectric film comprising:
a plurality of nanoparticles dispersed within an organic medium,
wherein the nanocomposite dielectric film has an average nanoparticle density, and
wherein the nanocomposite dielectric film has a nanoparticle density distribution within the range of about 90% to about 110% of the average nanoparticle density along a thickness of the film.
2. The nanocomposite dielectric film of claim 1 , each of the plurality of nanoparticles comprising an inorganic material that exhibits a dielectric constant greater than about 3.9.
3. The nanocomposite dielectric film of claim 1 , wherein the organic medium exhibits a dielectric strength greater than about 10 MV/m.
4. The nanocomposite dielectric film of claim 1 , each of the plurality of nanoparticles comprising a metal oxide.
5. The nanocomposite dielectric film of claim 4 , each of the plurality of nanoparticles comprising a metal oxide selected from the group consisting of hafnium oxide (HfO 2 ), zirconium oxide (ZrO 2 ), tantalum oxide (Ta 2 O 5 ), barium titanate (BaTiO 3 ), titanium dioxide (TiO 2 ), cerium oxide (CeO 2 ), lanthanum oxide (La 2 O 3 ), lanthanum aluminum oxide (LaAlO 3 ), lead titanate (PbTiO 3 ), silicon titanate (SiTiO 3 ), lead zirconate (PbZrO 3 ), tungsten oxide (WO 3 ), yttrium oxide (Y 2 O 3 ), bismuth silicon oxide (Bi 4 Si 2 O 12 ), barium strontium titanate (BST) (Ba 1−x Sr x TiO 3 ), PMN (PbMg x Nb 1−x O 3 ), PZT (PbZr x Ti 1−x O 3 ), PZN (PbZn x Nb 1−x O 3 ), PST (PbSc x Ta 1−x O 3 ), and/or combinations thereof.
6. The nanocomposite dielectric film of claim 1 , each of the plurality of nanoparticles having an average diameter of less than about 1,000 nm.
7. The nanocomposite dielectric film of claim 1 , each of the plurality of nanoparticles comprising a core and an outer layer, wherein the outer layer comprises a surface modifying agent conjugated to the core.
8. The nanocomposite dielectric film of claim 7 , wherein the surface modifying agent is configured to reduce the surface tension between the nanoparticles and the organic medium.
9. The nanocomposite dielectric film of claim 7 , wherein the surface modifying agent comprises a functional group selected from the group consisting of a phosphonic acid, a siloxane, a carboxylic acid, and/or combinations thereof.
10. The nanocomposite dielectric film of claim 9 , wherein the surface modifying agent is selected from the group consisting of a phosphonic acid-terminated polyethylene glycol, a siloxane-terminated polyethylene glycol, and/or a carboxylic acid-terminated polyethylene glycol.
11. The nanocomposite dielectric film of claim 1 , wherein the organic medium is a polymer.
12. The nanocomposite dielectric film of claim 1 , wherein the organic medium is a polymer obtained by polymerizing 2-methyl-2-vinyloxirane.
13. A capacitor comprising:
a first electrode;
a second electrode; and
a nanocomposite dielectric film disposed between the first and second electrodes,
wherein the nanocomposite dielectric film comprises a plurality of nanoparticles dispersed within an organic medium,
wherein the nanocomposite dielectric film has an average nanoparticle density, and
wherein the nanocomposite dielectric film has a nanoparticle density distribution within the range of about 90% to about 110% of the average nanoparticle density along a thickness of the nanocomposite dielectric film.
14. The capacitor of claim 13 , each of the plurality of nanoparticles comprising an inorganic material that exhibits a dielectric constant greater than about 3.9.
15. The capacitor of claim 13 , wherein the organic medium exhibits a dielectric strength greater than about 10 MV/m.
16. The capacitor of claim 13 , wherein the nanoparticle density distribution is substantially uniform along the thickness of the film.
17. An FET transistor comprising:
a gate electrode;
a channel region; and
a nanocomposite dielectric film disposed between the gate electrode and the channel region,
wherein the nanocomposite dielectric film comprises:
a plurality of nanoparticles dispersed within an organic medium,
wherein the nanocomposite dielectric film has an average nanoparticle density, and
wherein the nanocomposite dielectric film has a nanoparticle density distribution within the range of about 90% to about 110% of the average nanoparticle density along a thickness of the nanocomposite dielectric film.
18. The transistor of claim 17 , each of the plurality of nanoparticles comprising an inorganic material that exhibits a dielectric constant greater than about 3.9.
19. The transistor of claim 17 , wherein the organic medium exhibits a dielectric strength greater than about 10 MV/m.
20. The transistor of claim 17 , each of the plurality of nanoparticles comprising a metal oxide.