Method and apparatus for calibrating pressure sensor integrated circuit devices

1. A pressure sensor device comprising:

a capacitive pressure transducer; and

electronic elements comprising:

an oscillator circuit coupled to the capacitive pressure transducer;

a capacitance-to-digital converter coupled to the capacitive pressure transducer the oscillator circuit comprising a harmonic oscillator;

a communication bus coupled to the oscillator circuit and to the capacitance-to-digital converter;

memory coupled to the communication bus;

a microcontroller coupled to the communication bus; and

an input-output interface coupled to the communication bus,

wherein the microcontroller is operable to:

store, using the memory, a resonant frequency of a membrane of the pressure sensor device before the pressure sensor device has been attached to a circuit board,

manipulate, using the harmonic oscillator, a frequency of the membrane of the capacitive pressure transducer to bring the membrane into resonance;

determine the resonant frequency of the membrane of the pressure sensor device after the pressure sensor device has been attached to a circuit board;

calculate a change in resonant frequency between the determined resonant frequency and the resonant frequency stored in the memory;

calculate strain of the membrane of the pressure sensor device from the change in resonant frequency;

calibrate, using the oscillator circuit, the pressure sensor device based on a capacitance-to-pressure dependency calculated using the strain of the membrane of the pressure sensor device;

calculate capacitance-to-pressure calibration points using the capacitance-to-pressure dependency;

calculate a capacitance-to-pressure curve by interpolation over the capacitance-to-pressure calibration points; and

calibrate, using the oscillator circuit, the pressure sensor device based on the capacitance-to-pressure curve calculated.

2. The pressure sensor device of claim 1 , wherein the microcontroller is operable to interpolate the capacitance-to-pressure curve using a Thiele Continued Fraction Interpolation over three capacitance-to-pressure calibration points.

3. The pressure sensor device of claim 1 , wherein the microcontroller is operable to interpolate the capacitance-to-pressure curve using a Thiele Continued Fraction Interpolation over four capacitance-to-pressure calibration points.

4. The pressure sensor device of claim 1 , wherein the pressure sensor device further comprises an oscillator circuit operable to determine the resonant frequency of the pressure sensor device after the pressure sensor device has been attached to a circuit board.

5. The pressure sensor device of claim 4 , wherein the oscillator circuit is operable to determine the resonant frequency of the pressure sensor device after the pressure sensor device has been attached to the circuit board using at least one of electrostatic actuation and piezoelectric actuation.

6. The pressure sensor device of claim 1 , wherein the microcontroller is operable to determine the capacitance-to-pressure dependence using membrane stress, gap height and parasitic capacitance as determined from a physical model based on at least three capacitance-to-pressure calibration points.

7. The pressure sensor device of claim 1 comprising:

a semiconductor substrate including the electronic elements,

wherein the capacitive pressure transducer is on top of the semiconductor substrate, and

wherein the electronic elements are embedded in the semiconductor substrate.