Method for producing an electronic component and electronic component
View Patent ↗A method for producing an electronic component and an electronic component, having barrier layers for the encapsulation of the component. The method involves providing a substrate ( 1 ) with at least one functional layer ( 22 ), and an electronic component, applying at least one first barrier layer ( 3 ) on the functional layer ( 22 ) by way of plasmaless atomic layer deposition (PLALD), and applying at least one second barrier layer ( 4 ) on the functional layer ( 22 ) by way of plasma-enhanced chemical v0apor deposition (PECVD).
1. A method for producing an electronic component comprising barrier layers for the encapsulation of the component, comprising the steps of:
providing a substrate with at least one functional layer, applying at least one first barrier layer on the functional layer by means of plasmaless atomic layer deposition; and
applying at least one second barrier layer on the functional layer by means of plasma-enhanced chemical vapor deposition,
wherein the at least one first barrier layer is applied at a temperature of less than 100° C.; and the first barrier layer comprises at least one of:
a nitride comprising one of tin and zinc,
an oxynitride comprising one of tin, zinc, titanium, zirconium, tantalum,
niobium and hafnium, and
aluminum zinc oxide.
2. The method as claimed in claim 1 , wherein the at least one first barrier layer is applied at a temperature of less than 80° C.
3. The method as claimed in claim 1 , comprising the following further step:
applying a protective layer on the first and second barrier layers.
4. The method as claimed in claim 3 , wherein the protective layer has a spray coating.
5. The method as claimed in claim 1 , further comprising the step of:
applying a first electrode on the substrate and applying a second electrode on the at least one functional layer while providing the substrate with the at least one functional layer,
wherein the at least one functional layer comprises an organic functional layer, and
wherein the at least one first barrier layer is applied on the second electrode.
6. The method as claimed in claim 1 , wherein the at least one second barrier layer comprises one of an oxide, a nitride and an oxynitride.
7. The method as claimed in claim 1 , wherein a layer sequence composed of at least two layers comprising different materials is applied as the second barrier layer.
8. The method as claimed in claim 7 , wherein the at least two layers comprising different materials comprise a layer comprising an oxide and a layer comprising a nitride.
9. The method as claimed claim 1 , wherein at least one of at least one further first barrier layer and at least one further second barrier layer is applied.
10. The method as claimed in claim 7 , wherein the first and second barrier layers are applied alternately one on top of another.
11. The method as claimed in claim 1 , wherein the second barrier layer is applied before the first barrier layer.
12. The method as claimed in claim 1 , wherein the at least one first barrier layer and the at least one second barrier layer are applied at a temperature of less than 100° C.
13. The method as claimed in claim 1 , wherein the at least one first barrier layer has a thickness of greater than or equal to 10 nm and less than or equal to 30 nm.
14. The method as claimed in claim 1 , wherein the at least one second barrier layer has a thickness of greater than or equal to 100 nm and less than or equal to 1000 nm.
15. The method as claimed in claim 1 , wherein the electronic component comprises at least one of an organic light emitting diode (OLED) and a solar cell.
16. A method for producing an electronic component comprising barrier layers for the encapsulation of the component, comprising the steps of:
providing a substrate with at least one functional layer, applying at least one first barrier layer on the functional layer by means of plasmaless atomic layer deposition;
applying at least one second barrier layer on the functional layer by means of plasma-enhanced chemical vapor deposition; and
applying a protective layer on the first and second barrier layers,
wherein the at least one first barrier layer is applied at a temperature of less than 100° C.; and the first barrier layer comprises at least one of:
a nitride comprising one of tin and zinc,
an oxynitride comprising one of tin, zinc, titanium, zirconium, tantalum,
niobium and hafnium, and
aluminum zinc oxide.
17. The method as claimed in claim 16 , wherein the protective layer has a spray coating.
18. A method for producing an electronic component comprising barrier layers for the encapsulation of the component, comprising the steps of:
providing a substrate with at least one functional layer, applying at least one first barrier layer on the functional layer by means of plasmaless atomic layer deposition; and
applying at least one second barrier layer on the functional layer by means of plasma-enhanced chemical vapor deposition,
wherein the at least one first barrier layer is applied at a temperature of less than 100° C.,
a layer sequence composed of at least two layers comprising different materials is applied as the second barrier layer,
the first and second barrier layers are applied alternately one on top of another; and
the first barrier layer comprises at least one of:
a nitride comprising one of tin and zinc,
an oxynitride comprising one of tin, zinc, titanium, zirconium, tantalum,
niobium and hafnium, and
aluminum zinc oxide.